Amazon Technologies, Inc.

Nasser Alidoust

Oskar Jon Painter

Patricio Arrangoiz Arriola

Rassul Karabalin

Andrew Joseph Keller

David John Perello

Gregory Peairs

Hesam Moradinejad

Gregory Scott Maccabe

Matthew Sullivan Hunt

A fabrication method and associated apparatus is disclosed where an electromechanical resonator made out of lithium niobate is fabricated on the same substrate as a Josephson Junction-based transmon qubit. The starting material may be a high resistivity silicon wafer with a thin layer of lithium niobate (LiNbO¬). The fabrication method may include removing lithium niobate selectively from the substrate to preserve the quality of the substrate. The selective removal maintains defect free qualities of the silicon surface, thus enabling the fabrication of high performance Josephson Junction-based transmon qubit on the surface.

Method for producing transmon qubit and lithium niobate resonator on the same substrate

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Pasadena, CA, United States of America

Nasser Alidoust