Hitachi, Ltd.

Hitachi-High-Technologies Corporation

Hitachi High-Tech Corporation

Kaneka Corporation

Naruo Watanabe

Takanori Kato

Hironori Ogawa

Motohiro Takahashi

Shuichi Nakagawa

Masaki Mizuochi

Yoshihiro Nagaoka

Akira Nishioka

Hiroshi Mitsumaki

Ryo Miyake

Takao Terayama

Tomotaka Shibazaki

Yuji Miyahara

Yasushi Nomura

Yasuhiro Yoshimura

Yasuhiko Sasaki

Akira Koide

Hajime Katou

Teruhisa Akashi

Kei Takenaka

Tomoki Ohashi

Katsuhiko Kimura

Hajime Kato

Yoshio Takahashi

Yoshiaki Yamauchi

Satoshi Takahashi

Takeshi Shibuya

Hiroyasu Uchida

Taisaku Seino

Isao Shindo

Tomonari Morioka

Seiichi Kato

Noriyo Nishijima

Shigeyuki Sasaki

Michihiro Saito

Tsutomu Suzuki

Yukiko Ikeda

Minoru Ueda

Yasuhiko Ishida

Yoshihiro Komori

Yuji Oka

Masako Nomura, Legal Representative

Hiroshi Inomata

Hiroshi Tachikui

Satoshi Ozawa

The problem addressed by the present disclosure is to provide a stage device, a charged particle beam device, and a vacuum device, with which it is possible to increase the speed and the acceleration of positioning and to suppress the leakage of a magnetic field. As a means to resolve this problem, a stage devicecomprises a support stage, a floating mechanism, and a movement stage. The movement stagehas a propulsion-applying unit, and the support stagehas a propulsion-receiving unit. The stage deviceis configured so that when the movement stagemoves and the propulsion-applying unitcontacts or approaches the propulsion-receiving unit, the propulsion-applying unitapplies propulsion in the movement direction to the propulsion-receiving unit

Stage device, charged particle beam apparatus, and vacuum apparatus

A stage includes a sample table on which a sample is placed, a first drive mechanism moving the sample table in a first direction; a position measurement element measuring a position in the first direction that is a driving direction of the sample table. The stage also has a scale element having a scale measurement axis that is parallel to a first measurement axis in the first direction based on the position measurement element and is different from the first measurement axis in height, and measuring the position of the sample table in the first direction. A controller calculates the orientation of the sample table by using a measurement value by the position measurement element and a measurement value by the scale element and correcting the Abbe error of the sample table.

Stage apparatus and charged particle beam apparatus

Provided is a stage apparatus that reduces thermal deformation and temperature rise in an upper table on which a sample is mounted and a charged particle beam apparatus including the stage apparatus. The stage apparatus includes: an upper stage that moves an upper table on which a sample is mounted in a first direction; a middle stage that moves a middle table on which the upper stage is mounted in a second direction orthogonal to the first direction; and a lower stage that moves a lower table on which the middle stage is mounted in a third direction orthogonal to the first direction and the second direction. The upper table and the middle table use a material having a smaller thermal expansion coefficient than in a material of the lower table, and the lower table uses a material having higher thermal conductivity than in the material of the upper table and the middle table.

Stage apparatus, and charged particle beam apparatus

Provided is a charged particle beam apparatus including: an XY stage on which a sample is placed; a charged particle beam source which irradiates the sample with a charged particle beam; a detector which detects charged particles emitted from the sample upon the irradiation with the charged particle beam; an image generator which generates an SEM image of the sample based on a detection signal output by the detector; and a controller configured to set control parameters based on a movement starting point and a movement ending point of the XY stage and control a driving unit for moving the XY stage according to the control parameters.

Charged particle beam apparatus comprising a controller to set control parameters based on movement of the sample stage

To provide a lightweight and highly rigid stage device that can move in X and Y directions and a Z direction, and a charged particle beam device including the stage device. A stage device includes a chuck that is loaded with a sample, an XY stage that moves in X and Y directions, and a Z stage that moves in a Z direction. The Z stage includes: an inclined part that is fixed to the XY stage and includes an inclined surface inclined with respect to an XY plane; a movement part that moves on the inclined surface; and a table that is fixed to the movement part and is provided with the a plane parallel to the XY plane.

Stage device and charged particle beam device

The present invention is to provide a stage device capable of improving field-of-view positioning accuracy of a stage having a Z-axis mechanism. The invention is directed to a sample stage device having a first table that moves a sample in a first direction, a second driving mechanism that moves the first table in a second direction different from the first direction, and a part having a function of moving a laser interferometer optical axis that measures the position of the first table, in the second direction.

An object of the invention is to provide a stage apparatus that realizes compatibility between long stroke driving and reduction of a burden on a drive mechanism. In order to achieve the above object, there is suggested a stage apparatus including a first table that moves a sample in a first direction, a second table that moves the first table in a second direction different from the first direction, moving mechanisms that move the tables, respectively, a movable body that supports a moving mechanism, and a third moving mechanism that moves the movable body so as to follow the second table.

A sample micromotion mechanism adapted to minimize an influence of a disturbance and adjust a sample drift rapidly and with high accuracy, and designed so as to be a compact, easy-to-place sample micromotion mechanism of a side-entry type that suppresses the occurrence of the sample drift and generates/displays high-resolution monitoring images and precisely drawn patterns. A charged particle device employing the sample micromotion mechanism operates followed by deformation which causes a strain. A strain measuring unit measures such strain. The sample micromotion mechanism imparts micromotion so as to reduce the strain in accordance with the measured strain value, thereby reducing deformation of the sample micromotion mechanism.

Sample micromotion mechanism, method of using the same, and charged particle device

A device for cell culture capable of automatically performing operations for cell culture over several days to several months while minimizing the risk of contamination. A new medicine can be supplied to an incubator means by using a medicine supply means or unnecessary wastewater can be discharged from the incubator means by using a wastewater discharge means without taking out the incubator means disposed in heat insulation box means from a heat insulation box, and the state of the cell culture can be observed with the incubator means formed in the heat insulation box means. Accordingly, the outside air does not enter directly into the incubator means during culturing, and the risk of contamination is completely eliminated. As a result, the culturing operations can be automatically performed over a long period.

Device for cell culture

The invention provides a chemical analysis apparatus which easily agitates and warms up. A chemical analysis apparatus has a motor, a retaining disc which can be rotated by the motor, a plurality of inspection cartridges which are arranged on the retaining disc, a punching machine for punching the inspection cartridges, a warming apparatus and a detection apparatus. The inspection cartridge includes a container formed by a concave portion and a base plate having a flow path. A cover covering the container and the flow path is installed to the base plate. A liquid solution is moved to the container in an outer peripheral side with respect to a rotation axis from the container in an inner peripheral side with respect to the rotation axis via the flow path, by utilizing a centrifugal force generated on the basis of the rotation of the retaining disc. The inspection cartridge is provided with an agitating means for agitating the liquid solution within the container and a warming means for warming up the liquid solution within the container.

Chemical analysis apparatus and chemical analysis cartridge

The invention is achieved by feeding a reagent using centrifugal force, without providing a valve for controlling the flow rate of the reagent in the reagent flow path. A chemical analyzer is used which comprises a structure that is supported so as to be rotatable, said structure comprising a capturing section for capturing specific chemical substances from a specimen, specimen containers and reagent containers including washing solution containers. The washing solution containers and the other reagent containers comprise a liquid outlet port which is provided at the side opposite to the rotation center side, and the capturing section is held in the structure, closer to the outer periphery side than the specimen container and washing solution and the other reagent containers, and a flow path is provided, with a bent flow path portion which returns to the rotation center side, and which at a particular stage prevents the flow of liquid from the washing solution containers to the capturing section, and at another stage, forms the liquid flow due to the centrifugal force from the rotation of the structure.

Extractor chemical analyzer and chemical analyzing method

In a chemical analysis apparatus for extracting a specific substance, such as nucleic acid, from a sample containing a plurality of chemical substances, solutions remaining in valves are prevented so that a reagent in an earlier step does not contaminate the subsequent steps. Predetermined quantities of solutions are carried and supplied by centrifugal force without providing valves for controlling the flow of the solutions. After perforating the lids of ventilation holescommunicated with a detection containerand disposal containersandin an analysis disc, the analysis discis rotated to supply and carry a predetermined quantity of the sample.

Chemical analysis apparatus and genetic diagnostic apparatus

A nucleic acid refining apparatus, being ease in automation thereof, keeping high in contacting frequency between nucleic acid within a sample and a solid phase during nucleic acid capture processing, thereby proving high capturing rate, comprises: means for separating a liquid containing the nucleic acid therein from said sample through centrifugal force; means for transferring a reagent through the centrifugal force; means for producing a mixture liquid of said reagent transferred through the centrifugal force and a solution containing said nucleic acid therein; a carrier for capturing said nucleic acid; means for transferring said mixture liquid to said carrier through the centrifugal force; heating means for heating said carrier; and a holding means for separating and holding the reagent containing said nucleic acid eluting from said carrier, separating from other reagent, through different centrifugal.

Apparatus for purifying nucleic acid and method of purifying nucleic acid

A chemical analyzer for measuring a concentration of components of a sample liquid, by mixing the sample liquid with reagents, so as to react the reagents upon the components thereof, includes a carrier having an introducing portion through which the sample liquid is injected, passages for distributing the sample liquid injected from the introducing portion, and plural reactor portions which hold the sample liquid therein to be mixed with the reagent, thereby to react. A movable driver portion is provided on which the carrier is mounted and a reagent charging device is provided for ejecting the reagents which are different for the respective plural reactor portions of the carrier, sequentially. Further, a detector is provided for detecting the components after mixing the reagents with the sample liquid.

Chemical analyzer and chemical analyzing system

A chemical analyzer for measuring a concentration of components of a sample liquid, by mixing the sample liquid with reagents, so as to react the reagents upon the components thereof. The chemical analyzer includes a carrier which is constructed on a substrate and has an introducing portion through which the sample liquid is injected, distributing flow passages for distributing the sample liquid injected from the introducing portion, and plural reactor portions, each holding the sample liquid therein to be mixed with the reagent, thereby to react. A movable driver portion is provided for mounting the carrier thereon, and a reagent charging device is provided for ejecting the reagents, which are different for the respective reactor portions of the carrier. Further, a detector is provided for detecting the components after mixing the reagents with the sample liquid.

Growing community of inventors

Tokyo, Japan

Naruo Watanabe