Toyota Jidosha Kabushiki Kaisha

Denso Corporation

Kabushiki Kaisha Tokai Rika Denki Seisakusho

Kabushiki Kaisha Toyota Chuo Kenkyusho

Narumasa Soejima

Yukihiko Watanabe

Masahiro Sugimoto

Hidefumi Takaya

Yuichi Takeuchi

Tsuyoshi Ishikawa

Hirokazu Fujiwara

Jun Morimoto

Naohiro Suzuki

Toshimasa Yamamoto

Tsutomu Uesugi

Tetsu Kachi

Shinichiro Miyahara

Hiroyuki Ueda

Akitaka Soeno

Tomohiro Mimura

Kensaku Yamamoto

Kazumi Chida

Yoshitaka Nakano

Hideo Matsuki

Shuhei Mitani

Takashi Suzuki

Takashi Katsuno

Hiroki Watanabe

Kengo Shima

Yosuke Kanie

Shinya Nishimura

Jun Saito

Yasushi Urakami

Shoji Mizuno

Takeo Yamamoto

Takeshi Endo

Jun Kawai

Tomohiko Mori

Masaki Konishi

Yasuo Kitou

Hideya Yamadera

Tomoo Morino

Aiko Kaji

Takashi Kanemura

Teruaki Kumazawa

Masaru Nagao

Toru Ikeda

Yasushi Furukawa

Kazuya Adachi

Yukihiro Wakasugi

Norihiro Togawa

Masatoshi Tsujimura

Haruhito Ichikawa

Masahiro Kumita

Hisashi Ishimabushi

A method for manufacturing a semiconductor device includes: forming an insulating film on a surface of a semiconductor layer of a semiconductor substrate; forming a contact hole in the insulating film; forming a conductor material on the insulating film to be in contact with the semiconductor layer through the contact hole; and patterning the conductor material using an alignment key included in the conductor material.

Method for manufacturing semiconductor device

A silicon carbide semiconductor device includes a semiconductor element with a MOS structure having: a substrate; a drift layer on the substrate; a base region on the drift layer; a source region on the base region; a trench gate structure having a gate insulation film and a gate electrode in a gate trench disposed from a surface of the source region to be deeper than the base region; an interlayer insulation film covering the gate electrode and the gate insulation film; a source electrode on the interlayer insulation film, the source region and the base region; and a drain electrode. The semiconductor element flows a current when a gate voltage is applied to the gate electrode and a channel region is provided in a portion of the base region in contact with the trench gate structure.

Silicon carbide semiconductor device and method for manufacturing the same

A method of manufacturing a semiconductor device is provided, and the method may include: preparing a semiconductor substrate constituted of a group III nitride semiconductor, a main surface of the semiconductor substrate being a c-plane; forming a grove on the main surface by dry dry-etching the main surface; and wet-etching an inner surface of the groove using an etchant to expose the c-plane of the semiconductor substrate in a wet-etched region, the etching having an etching rate to the c-plane of the semiconductor substrate that is lower than the etching rate to a plane other than the c-plane of the semiconductor substrate.

Method of manufacturing semiconductor device

A protection device includes a semiconductor substrate including a protection element; an insulating layer covering a surface of the semiconductor substrate; a conductive layer disposed in the insulating layer, and extending in a plane that is parallel with the surface of the semiconductor substrate; a passive element formed with an elongated conductor, curved in a plane that is parallel with the conductive layer, and located over the conductive layer; and an input terminal, an output terminal, and a ground terminal exposed in a surface of the insulating layer. One end of the passive element is electrically connected to the input terminal, the other end of the passive element and a high-potential-side terminal of the protection element are electrically connected to the output terminal, and a low-potential-side terminal of the protection element and the conductive layer are electrically connected to the ground terminal.

Protection device

A semiconductor device may be provided with a semiconductor substrate, an upper electrode, a lower electrode and a gate electrode provided within a trench via a gate insulator film. The semiconductor substrate may include a p-type body layer being in contact with the upper electrode, an n-type drift layer intervening between the body layer and the lower electrode, a p-type floating region provided along a bottom surface of the trench, and a p-type connection region extending between the body layer and the floating region along a side surface of the trench. The trench may include a first section where the connection region is not provided and a second section where the connection region is provided. An inclination angle of the side surface of the trench in the second section may be greater than an inclination angle of the side surface of the trench in the first section.

Semiconductor device

A method of manufacturing a semiconductor device is provided with: implanting charged particles including oxygen into a surface of a SiC wafer; and forming a Schottky electrode that makes Schottky contact with the SiC wafer on the surface after the implantation of the charged particles.

A semiconductor device includes: a drain region; a drift layer made of a first conductivity type semiconductor with lower impurity concentration than the drain region; a base region made of a second conductivity type semiconductor; a source region made of the first conductivity type semiconductor with higher concentration; a contact region made of the second conductivity type semiconductor with higher concentration; a trench structure having a first gate insulation film and a first gate electrode arranged at an opening side of the trench and to be deeper than the base region, and a bottom part insulation film; a source electrode electrically connected to the source and contact regions; and a drain electrode at a rear side of the drain region. The drain is arranged to be deeper than the base region. The first gate insulation film is made of higher dielectric insulation material than the bottom part insulation film.

A method of manufacturing a semiconductor device includes: setting a plurality of main semiconductor wafers and a plurality of sub semiconductor wafers in a load lock chamber of an electrode forming equipment; repeating a wafer-transfer and electrode-formation process of transferring at least one of the main semiconductor wafers from the load lock chamber to the film formation chamber in a state where the load lock chamber and the film formation chamber are decompressed and then forming a surface electrode on a surface of the at least one main semiconductor wafer transferred in the film formation chamber; removing the main semiconductor wafers on which the surface electrodes have been formed and the sub semiconductor wafers from the electrode forming equipment without forming an electrode on the sub semiconductor wafers by the electrode forming equipment; and making the surface electrodes Schottky-contact the main semiconductor wafers.

A semiconductor device used in a protection circuit including a thyristor and an LCR circuit which includes a coil L, a capacitor C and a resistor R, the semiconductor device may include: a semiconductor layer in which the thyristor is provided; an insulating film provided on the semiconductor layer; and a pair of electrodes provided on the insulating film and connected to a protection target circuit, wherein at least one of the coil L, the capacitor C and the resistor R is provided in the insulating film, and the at least one of the coil L, the capacitor C and the resistor R is connected to an anode of the thyristor by a first metal wire filling a first hole provided in the insulating film.

A switching device includes a semiconductor substrate; a trench; a conductor layer extending in a longitudinal direction of the trench so as to be in contact with a bottom surface of the trench; a bottom insulating layer covering an upper surface of the conductor layer; a gate insulating layer covering a side surface of the trench; and a gate electrode disposed in the trench. The semiconductor substrate includes a first semiconductor region of a first conductivity type, a body region of a second conductivity type, a second semiconductor region of the first conductivity type, a bottom semiconductor region of the second conductivity type extending in the longitudinal direction so as to be in contact with the conductor layer, and a connection semiconductor region of the second conductivity type connected to the body region and to the bottom semiconductor region.

Switching device and method of manufacturing the same

A semiconductor device includes a p-type semiconductor region in contact with a bottom face of a trench gate, wherein the p-type semiconductor region includes a first p-type semiconductor region containing a first type of p-type impurities and a second p-type semiconductor region containing a second type of p-type impurities. The first p-type semiconductor region is located between the trench gate and the second p-type semiconductor region. In a view along the depth direction, the second p-type semiconductor region is located within a part of the first p-type semiconductor region. A diffusion coefficient of the second type of p-type impurities is smaller than a diffusion coefficient of the first type of p-type impurities.

Semiconductor device and manufacturing method thereof

A semiconductor device provided herein includes: a fourth region of a p-type being in contact with a lower end of the gate trench; a termination trench provided in the front surface in a range outside the second region; a lower end p-type region of the p-type being in contact with a lower end of the termination trench; a lateral p-type region of the p-type being in contact with a lateral surface of the termination trench on an outer circumferential side, connected to the lower end p-type region, and exposed on the front surface; and a plurality of guard ring regions provided on the outer circumferential side with respect to the lateral p-type region and exposed on the front surface.

Semiconductor device and method for manufacturing the semiconductor device

An SiC semiconductor device has a p type region including a low concentration region and a high concentration region filled in a trench formed in a cell region. A p type column is provided by the low concentration region, and a ptype deep layer is provided by the high concentration region. Thus, since a SJ structure can be made by the p type column and the n type column provided by the n type drift layer, an on-state resistance can be reduced. As a drain potential can be blocked by the ptype deep layer, at turnoff, an electric field applied to the gate insulation film can be alleviated and thus breakage of the gate insulation film can be restricted. Therefore, the SiC semiconductor device can realize the reduction of the on-state resistance and the restriction of breakage of the gate insulation film.

Silicon carbide semiconductor device and method for producing the same

In a method of manufacturing a silicon carbide semiconductor device including a vertical switching element having a trench gate structure, with the use of a substrate having an off angle with respect to a (0001) plane or a (000-1) plane, a trench is formed from a surface of a source region to a depth reaching a drift layer through a base region so that a side wall surface of the trench faces a (11-20) plane or a (1-100) plane, and a gate oxide film is formed without performing sacrificial oxidation after formation of the trench.

Silicon carbide semiconductor device and method of manufacturing the same

An electron emission device includes a substrate and an electron emission layer. The electron emission layer is provided above the substrate, and is provided with an opening. The electron emission layer has an edge defining the opening and is configured to emit electrons from the edge when the edge is irradiated with light.

Electron emission device and transistor provided with the same

Growing community of inventors

Seto, Japan

Narumasa Soejima