Mitsubishi Jidosha Kogyo Kabushiki Kaisha

Tokyo Electron Limi Ted

Sony Group Corporation

Naoyuki Suzuki

Keita Tanaka

Ryosuke Yamamoto

Ryoji Nakahama

Einstein Noel Abarra

Shuji Fujita

Hajime Tsuchihara

Ikumasa Moriyasu

Masato Shinada

Hiroaki Chihaya

Koya Nomoto

Katsutoshi Ishikawa

Kazunaga Ono

Tamaki Takeyama

Yuji Ishigaki

A film thickness measurement apparatus includes: a stage that places a substrate having a film formed thereon and measures a thickness of the film in-situ in a film forming apparatus; a film thickness meter including a light emitter that emits light toward the substrate disposed on the stage and a light receiving sensor that receives the light reflected by the substrate for measuring the thickness of the film in-situ; a moving mechanism including a multi-joint arm that moves an irradiation point of the light on the substrate; a distance meter that measures a distance between the light receiving sensor and the irradiation point on the substrate; and a distance adjustor that adjusts the distance between the light receiving sensor and the irradiation point on the substrate.

Film thickness measuring apparatus and film thickness measuring method, and film forming system and film forming method

This invention relates to an impact energy absorbing structure for a cabin of an automotive vehicle. The impact energy absorbing structure is provided with a trim member (10) covering an inboard side of a structural member, which constitutes the cabin of the automotive vehicle. An impact absorbing member is interposed between the inboard side of the structural member and the trim member (10), so that impact energy directed from a surface of the trim member (10) toward the structural member can be absorbed. When an occupant of the cabin is about to hit the structural member, impact energy is damped so that the occupant can be protected. The structural member includes a pillar (1) or the like, which constitutes the cabin of the automotive vehicle. The trim member (10) is arranged to cover an inboard side of the pillar (1) or the like. Resin-made ribs (11) or the like can be mentioned as the impact absorbing member. It is possible to design the structure so that impact energy directed from the surface of the trim member (10) toward the pillar (1) or the like can be absorbed through deformation or destruction of these resin-made ribs (11).

Impact energy absorbing structure for vehicle cabin

Growing community of inventors

Tokyo, Japan

Naoyuki Suzuki