Matsushita Electric Industrial Co., Ltd.

Naoyuki Hashimoto

Youichi Nakamura

Sakae Kobayashi

Kazuhiro Mori

Kazuichi Yamashita

Manabu Yamane

Yoshiyuki Kubota

Tatsuki Nogiwa

A clean space system prevents pollution of clean surroundings in a processing space. Pollution is avoided which could otherwise occur when a worker comes in contact with the processing space while carrying out processes and operations in the clean surroundings. The apparatus includes a clean processing space, in which the processes and operations are carried out, and a preparing space coupled with an opening for work in the processing space. The preparing space is used by the worker prior to entering the processing space. In the preparing space, the worker performs preliminary actions such as changing his clothes and cleaning himself using an air shower to remove particles from his body.

Clean space system

According to the present invention, chamber units are sequentially coupled with each other to thereby provide a volume of clean space, and whereby different environments can be maintained in the different chamber units. An air blowhole or door is provided at an opening section of each chamber unit. Moreover, a space section can be defined at the coupling part of the chamber units, and a suction pump and a suction hose can be provided in the space section, so as to prevent the environments of the different chambers from influencing one another.

Coupling-type clean space apparatus

A clean space having a desired total volume is formed by coupling unit room bodies in sequence. Alterations in the configuration of clarifying and air-conditioning facilities are carried out easily and quickly, even if the structure and disposition of the clean space are altered. Each of the unit room bodies includes an air-circulator such as a fan unit and a dust catcher such as an air-filter. Each of the unit room bodies also includes an air conditioner-setting space shut off from the clean space in the interior of the unit room body.

Coupling type clean space apparatus

A pallet shifter having two pallet carriers (4a, 4b) rotated by a hydraulic cylinder (5) or the like, the pallet carriers (4a, 4b) being kept in horizontality by a parallelogram link (50, 60) defined by a center (7) of rotation of the driving lever (8), a center (11) of rotation of a pallet carriers (4a, 4b), a center (12) of rotation of a stabilizing lever (13), and a coupling point (14) of the stabilizing lever (13) and the pallet carriers (4a, 4b).

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Hirakata, Japan

Naoyuki Hashimoto