Yokogawa Electric Corporation

Ando Electric Company

Naoyuki Fujimura

Minoru Maeda

Tadashi Sugiyama

Takaaki Hirata

Alan Cowie

Jie Zhu

Nobuhiko Kanbara

Yasuhiko Mitsumoto

Masaya Ooyama

Junichi Matsuo

Yoshitaka Kobayashi

A gas analyzer includes an optical emitter that irradiates measurement light into a measurement region including a measured-gas, a first optical receiver that receives the measurement light passing through the measurement region, a splitting unit between the optical emitter and the measurement region that splits off a portion of the measurement light irradiated from the optical emitter to yield reference light, a reference unit, and an optical component. The reference unit holds a gas containing a measurement target component identical with the measured-gas but at a known concentration and a second optical receiver that receives the reference light passing through the region including the gas. The optical component is disposed between the splitting unit and the region and expands the beam diameter of the reference light to be larger at the second optical receiver than the receiving diameter of the second optical receiver.

Gas analyzer

A laser gas analyzer includes a wavelength-variable laser having a wide wavelength-variable width, a light-split module configured to split an output light of the wavelength-variable laser into a measurement light and a reference light, a first gas cell into which gases to be measured are introduced, and the measurement light is made to be incident, and a data processor configured to obtain an absorption spectrum of each of the gases to be measured based on a reference signal related to the reference light and an absorption signal related to an output light of the first gas cell, and to obtain concentrations of the respective gases to be measured.

Laser gas analyzer

The invention provides a method of cleaning probes, capable of simplifying a cleaning process without causing a damage to the probes, and a cleaning system for use in carrying out the method. A cylindrical body supported so as to be opposed to a probe card with probes formed thereon is provided with an ultrasonic vibrator and an ultrasonic wave generation device for causing the ultrasonic vibrator to undergo ultrasonic vibration. By causing the ultrasonic vibrator to undergo ultrasonic vibration by the agency of the ultrasonic wave generation device, a standing wave comprising nodes and antinodes occurring in concentric circles is generated inside the cylindrical body. In such a state, the cylindrical body is caused to make relative translation against the probe card such that the respective antinodes of the standing wave are caused to travel in sequence so as to coincide with a position of the respective probes, so that foreign particles stuck to the surface of the respective probes are removed through a non-contact method due to vibration of air.

Method of and system for cleaning probes

A method of lining up micro-balls on an arraying jig includes removing an excess of the micro-balls located thereat with ease. The micro-balls are supplied onto the arraying jig having a plurality of array holes formed therein. A cylindrical body is disposed above the arraying jig, and the micro-balls are maintained at the array holes by an air vacuum through the array holes of the arraying jig. A standing wave having nodes formed concentrically is generated inside the cylindrical body by subjecting the cylindrical body to ultrasonic vibration, so that the micro-balls are concentrated at the nodes of the standing wave. By moving the cylindrical body horizontally over the arraying jig while maintaining the ultrasonic vibration, the micro-balls are distributed into the respective array holes. By weakening a suction force acting through the array holes and subjecting the cylindrical body to ultrasonic vibration while moving the cylindrical body horizontally over the arraying jig, the excess of the micro-balls at the top of the arraying jig is concentrated at the nodes of the standing wave, and then is removed.

Method of lining up micro-balls

Growing community of inventors

Musashino, Japan

Naoyuki Fujimura