Murata Manufacturing Co., Ltd.

Naoyuki Endo

Toshimaro Yoneda

Shinsuke Ikeuchi

Yoshitaka Matsuki

A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (KNa)NbO-nCaTiO, wherein m, n, and x in the general formula are within the ranges of 0.87&#x2264;m&#x2264;0.97, 0&#x2264;n&#x2264;0.065, and 0&#x2264;x&#x2264;1.

Piezoelectric thin film, piezoelectric thin film device, target, and methods for manufacturing piezoelectric thin film and piezoelectric thin film device

A piezoelectric thin film contains potassium sodium niobate represented by general formula (KNa)NbOand CaTiO, wherein the lattice spacing calculated from the diffraction peak of the (001) plane in an X-ray diffraction profile of the piezoelectric thin film is 3.975 &#x212b; or less, and the ratio I/Iof the diffraction peak intensity Iof the (101) plane to the diffraction peak intensity Iof the (001) plane in the X-ray diffraction profile of the piezoelectric thin filmsatisfies the relationship log(I/I)&#x2264;&#x2212;2.10.

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Nagaokakyo, Japan

Naoyuki Endo