Nikon Corporation

Naoyasu Uehara

Seishi Fujiwara

Motofusa Kageyama

Minako Azumi

Shitoka Suzuki

Yuka Narukawa

The calcium fluoride member includes a first member made from monocrystalline calcium fluoride and a second member made from monocrystalline or polycrystalline calcium fluoride. The first member and the second member is pressure-bonded together to form the calcium fluoride member.

Calcium fluoride member, method for producing same, and method for pressure-bonding calcium fluoride crystal

A polycrystalline CaFmember includes a combined assembly of a plurality of polycrystalline bodies made from CaFthat are pressure bonded together.

Polycrystalline CaF2 member, member for plasma treatment device, plasma treatment device, and method for producing focusing ring

There is provided a calcium fluoride optical member formed from monocrystalline calcium fluoride and having a tubular shape. A {110} crystal plane or a {111} crystal plane of the monocrystalline calcium fluoride is orthogonal to a center axis of the tube.

Calcium fluoride optical member, manufacturing method therefor, gas-holding container, and light source device

A CaFpolycrystalline body which is a polycrystalline body constituted of CaFand of which an average grain size of crystalline grains is 200 &#x3bc;m or more, and a method for producing a CaFpolycrystalline body, the method including a process of introducing a compact which is obtained by using a CaFpowder raw material into a vacuum sintering furnace and sintering at a temperature of not higher than 1400&#xb0; C. for six hours or more, thereby obtaining the CaFpolycrystalline body.

Growing community of inventors

Sagamihara, Japan

Naoyasu Uehara