Canon Kabushiki Kaisha

Sii Nanotechnology Inc.

Seiko Instruments Inc

Hitachi High-tech Science Corporation

Naoya Watanabe

Osamu Takaoka

Masatsugu Shigeno

Masatoshi Yasutake

Takashi Imai

Yasuhide Ueno

Yoshiharu Shirakawabe

Shigeru Wakiyama

Takeshi Toyama

Masato Iyoki

Akira Inoue

Osamu Matsuzawa

Amiko Nihei

Kazutoshi Watanabe

Junji Iguchi

Shunichi Fujise

Takehiro Yoshida

Makoto Kobayashi

Atsushi Ikeda

Yuji Yamamoto

Toshiyuki Watanabe

Atsushi Uemoto

Hisao Terajima

Hiroshi Muramatsu

Yosuke Ezumi

Fumio Shoji

Yasuyuki Nakamura

Yasuyuki Shinada

Yuji Kurosawa

Masayuki Suda

Shinya Kogure

Yukio Nohata

Koji Okamura

Yoshiteru Shikakura

Makoto Mikuni

Kazuyoshi Furuta

Takahiro Kiyohara

Yuji Shimahara

Takuya Nakaue

A cell detachment method for detaching only a desired cell from a plurality of cells cultured on a substrate under predetermined culture environment conditions by using a scanning probe microscope having a probe, comprising: observing the plural cells; specifying the cell to be detached; moving the probe onto the specified cell; and pressing the prove against the specified cell with a predetermined force so as to detach the cell from the substrate.

Cell detachment method

Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

Cantilever, cantilever system, scanning probe microscope, mass sensor apparatus, viscoelasticity measuring instrument, manipulation apparatus, displacement determination method of cantilever, vibration method of cantilever and deformation method of cantilever

A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.

Self displacement sensing cantilever and scanning probe microscope

The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.

Sensor for observations in liquid environments and observation apparatus for use in liquid environments

A cantilever includes: a lever portion; a holder portion supporting the proximal end of the lever portion; a probe portion arranged at the distal end of the lever portion and having a spherical surface to face a sample; and a retaining portion fixed to the distal end of the lever portion and retaining the probe portion to surround a periphery of the probe portion. There is provided a cantilever allowing mounting of a probe portion with little effect in a short time without using any adhesive.

Cantilever and cantilever manufacturing method

A scanning probe microscope has a probe needle and a control section that controls relative scanning movement between the probe needle and a surface of a sample in at least one direction parallel to the sample surface and controls relative movement between the probe needle and the sample surface in a direction perpendicular to the sample surface. A vibration source vibrates the probe needle at a vibrating frequency relative to the sample surface. An approach/separation drive section causes the probe needle to relatively approach to and separate from the sample surface at a predetermined distance while the probe needle is vibrated at the vibrating frequency relative to the sample surface by the vibration source. A detection section detects a rate of change in a vibration state of the probe needle in accordance with a distance between the probe needle and the sample surface. An observation section gathers observation data from the sample surface when the rate of change in the vibration state of the probe needle detected by the detection section has exceeded a preselected threshold value.

Scanning probe microscope and scanning method

The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.

Working method using scanning probe

A sample to be processed is disposed within a processing cell which contains a liquid. Scratch processing using a scanning probe microscope is performed within the liquid so that chips or shavings removed from the sample scatter within the liquid rather than collecting on the surface of the sample. The processing cell has a supply port and a discharge port so that new liquid can be supplied within the cell through the supply port after the termination of the scratch processing to clean the cell. In this manner, chips or shavings generated by scratch processing a defect portion of the sample can be removed completely without being collected at the surface of a sample despite the surface tension of adsorbed water existing on the sample surface and/or electrostatic charges caused by friction.

Scratch repairing processing method and scanning probe microscope (SPM) used therefor

An indentation is formed by thrusting a probe of a scanning probe microscope for processing, which has a vertical surface or a vertical ridge and is harder than sample material, into sample for measuring the indentation. A high-fidelity AFM observation is performed on the shape of the formed indentation with a thin probe with high aspect ratio, the direction of the vertical surface or the vertical ridge is inspected, and the angle error &#x3b8; is stored. By rotating a sample stage by an angle corresponding to the measured mounting angle error &#x3b8; of the probe, the mounting angle error of the probe is corrected in advance.

Method of processing vertical cross-section using atomic force microscope

A processing method uses a probe of a scanning probe microscope. A fine marker is formed in a processing material by thrusting the probe, which is made of a material harder than the processing material, into a portion of the processing material disposed in the vicinity of an area of the processing material to be processed by the probe during a processing operation. A position of the fine marker on the processing material is detected during the processing operation. A drift amount of the area of the processing material is calculated in accordance with the detected position of the fine marker. A position of the area of the processing material is corrected in accordance with the calculated drift amount.

Processing method using probe of scanning probe microscope

The kind of a particle is determined by pressing a hard atomic force microscope stylus having a spring constant equal to or larger than 300 N/m onto a particle to be removed and detecting bending quantity relative to a press force and a kind of a stylus used for removing the particle is changed in accordance with the kind of the particle.

Method of removing particle of photomask using atomic force microscope

A facsimile machine in which multiple items of account information can be registered in an internal memory with the machine being capable of sending and receiving E-mail is disclosed. If the facsimile machine has been instructed to perform an E-mail operation and multiple items of account information has been registered, one of these items of account information is selected and authentication processing is executed. If only one item of account information has been registered, then this account information is used but the authentication processing is omitted. Thus, depending upon the account registration circumstances, an E-mail operation can be performed without performing an account selection operation and/or personal authentication. The result is improved operability.

Facsimile apparatus and control method

An image processing system includes an input unit, a selecting unit, a determining unit and a control unit. The input unit inputs one of a color image and a monochrome image, and the selecting unit selects either a normal recording mode for recording an image on a recording material at a predetermined recording density, and a decimation recording mode for recording the image on the recording material at a recording density lower than that of the normal recording mode. The determining unit determines if the input image is a color image or a monochrome image, and the control unit changes to the normal recording mode, when the decimation recording mode is selected and the input image is determined to be a color image.

Image processing apparatus and method selectively utilizing lower than normal image recording density

Disclosed are a communication apparatus capable of registering telephone directory data at once from e-mail containing the telephone directory data into a telephone directory of a communication apparatus. A communication apparatus according to this invention is a communication apparatus having a function of transmitting/receiving e-mail, and characterized by including a communication partner information storage unit for storing communication partner information having predetermined registration items, an identifier detecting unit for detecting a predetermined identifier from received e-mail, and a registering unit for registering information described in the e-mail in accordance with the detected identifier into that registration item of the communication partner information which corresponds to the identifier.

Communication apparatus and control method of the same

There is provided a device in which a probe can be used for both of observation and correction, and which can, even if a next generation photomask of ultra minute structure is made an object, perform a desired processing without injuring a normal portion in a process of obtaining information of a position and a shape of a defect part, and without impairing the probe also at a processing time. It has been adapted such that, at an observation time, a contact pressure between a probe and a mask is reduced to 0.1 nN by applying a vibration of 1 kHz to 1 MHz to the probe. It has been adapted such that a cantilever used in the present invention is formed by a silicon material of 100&#x2013;600 &#x3bc;m in length and 5&#x2013;50 &#x3bc;m in thickness and, at the observation time, the probe contacts with the mask at the contact pressure of 0.1 nN and, at the processing time, a defect correction can be performed by causing the probe to contact with the mask at the contact pressure of 10 nN to 1 mN.

Growing community of inventors

Chiba, Japan

Naoya Watanabe