Disco Corporation

Naoya Tokumitsu

Satoshi Arai

Masaya Takeuchi

Seiki Ohishi

Nobukazu Dejima

Yuji Okimoto

Takeshi Komaba

A processing liquid supplying apparatus including a reservoir containing an additive to be added to a liquid flowing through a passage connected at one end to a liquid supply source and at another end to a processing apparatus; an injection pump for injecting the additive into the passage; a weight measuring unit for measuring the weight of the reservoir and converting the weight into an electrical signal at a predetermined interval while the liquid flows in the passage and the additive is injected; a deciding unit for receiving the electrical signal from the weight measuring unit and deciding whether the measured value of the weight of the reservoir is being reduced at a predetermined rate; and a warning unit for issuing a warning that injection is improper when it is decided by the deciding unit that the measured value of the weight is not being reduced at the predetermined rate.

Processing liquid supplying apparatus

A cassette assembly for storing a plurality of platelike workpieces. The cassette assembly includes a first cassette, a second cassette stacked on the first cassette, and a fixing unit for fixing the first cassette and the second cassette to each other in the stacked condition. Both of the cassettes include a first side plate having workpiece supporting grooves, and a second side plate arranged parallel to the first side plate. The second side plate has workpiece supporting grooves respectively opposed to the workpiece supporting grooves of the first side plate, a top plate for connecting the upper ends of the first and second side plates, a bottom plate for connecting the lower ends of the first and second side plates, and a load/unload opening formed near the front ends of the first and second side plates, the top plate, and the bottom plate for loading and unloading the workpieces.

Assemblies of stacked cassettes

A cutting device having a holding element for holding a workpiece, a pair of cutting blades for cutting the workpiece held by the holding element, the cutting blades being adapted to be rotated, a wear amount detecting element for detecting the amount of wear of each of the pair of cutting blades, and a control element. The control element is arranged to selectively cut the workpiece by both of the pair of cutting blades, or cut the workpiece by one of the pair of cutting blades. When the workpiece is to be cut by one of the pair of cutting blades, the control element compares the amounts of wear of the pair of cutting blades detected by the wear amount detecting element, and allows the cutting blade having a smaller amount of wear to cut the workpiece.

Growing community of inventors

Tokyo, Japan

Naoya Tokumitsu