Sumitomo Chemical Company, Limited

Naoya Satoh

Yuji Yoshida

Koji Nishioka

Mikio Takigawa

An object of the present invention is to provide a production method for a backing plate that can reduce displacement of the groove. The present invention relates to a production method for a backing plate, comprising joining a plate-shaped body having a groove on one side and a cover member, wherein: the groove has at least two first parts extending in the longitudinal direction; a region where the body and the cover member are joined to each other has at least four first regions to be joined extending in the longitudinal direction and corresponding to two opposing side surfaces in each of the at least two first parts; and the joining of the body and the cover member to each other in the at least four first regions to be joined is performed by: (a) joining the body and the cover member to each other in one first region to be joined corresponding to one side surface in one first part; (b) joining the body and the cover member to each other in one region to be joined, among the remaining regions to be joined, corresponding to one side surface in another first part; and (c) repeating the step (b).

Backing plate, sputtering target, and production methods therefor

A sputtering target packaging structure comprising:

Sputtering target packaging structure and method of packaging sputtering target

Coating liquid for producing insulating film having low dielectric constant is provided. It was achieved by coating liquid for producing insulating film having low dielectric constant comprising a thermosetting resin having carbon-carbon unsaturated bond, an organic solvent, and less than two molecular equivalents of water to the carbon-carbon unsaturated bond.

Coating liquid for producing insulating film having low dielectric constant

A heat-resistant polyether having a heat resistance to a temperature of 300&#xb0; C. or higher, sufficient solubility in organic solvents, low water absorption and high adhesion to substrates is provided by a heat-resistant polyether including a repeating unit represented by the formula (1) and having a polystyrene-converted weight-average molecular weight determined by GPC of not less than 1000 and not more than 50000:wherein Ar represents a bivalent organic group having an aromatic ring; Rto Reach independently represent a hydrogen atom or an aryl group which may be substituted; and when at least one of Rto Ris an aryl group which may be substituted, X represents a direct bond or a hydrocarbon group having 1 to 20 carbon atoms, while when all of Rto Rare hydrogen atoms, X is represented by the formula (2):&#x2014;CR(R)&#x2014;&#x2003;&#x2003;(2)wherein Rand Reach independently represent an aryl group which may be substituted.

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Tsukuba, Japan

Naoya Satoh