Other

Fujikin Inc.

Naoya Masuda

Nobukazu Ikeda

Michio Yamaji

Tadahiro Ohmi

Hirofumi Kitayama

Yoichi Kurono

Takashi Hirose

Yukio Minami

Keiji Hirao

Tetsuya Kojima

Shigeru Itoi

Hiroshi Morokoshi

Yuji Kawano

Kosuke Yokoyama

Shigeaki Tanaka

Hisashi Tanaka

Masayuki Hatano

Michio Kuramochi

Michihiro Kashiwa

An apparatus for feeding gases for use in semiconductor manufacturing reduced in size and manufacturing costs and facilitating maintenance and operation of the gas supply system. The apparatus comprises a plurality of gas supply sources, gas source valves provided on the gas lead-out pipes from the respective gas supply sources, flow rate controllers provided on main gas feed pipes into which the lead-out pipes converge, and gas supply valves provided on the outlet side of the flow rate controllers.

Method for feeding gases for use in semiconductor manufacturing

A fluid control apparatus having a plurality of fluid control members each further having, a blocklike body with an upper side and a lower side, at least one monofunctional member for controlling fluid mounted on the upper side of the blocklike body, and at least one fluid channel formed between the monofunctional member for controlling fluid and the bottom side of the blocklike body; a plurality of couplings each further having, a blocklike body mounted to the bottom surface of at least one fluid control member, at least one communication channel for fluids communicating between at least two fluid channels of at least two different fluid control members; and a base plate for supporting a plurality of couplings. Each of the plurality of fluid control members is mounted to each of the plurality of couplings so as to be individually removable therefrom.

Fluid control apparatus

Apparatus for feeding gases for use in semiconductor manufacturing

A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing an outlet of the valve at the end to communicate with an inlet of the other valve adjacent thereto, an outflow channel forming member having a channel in communication with an outlet of the other valve, and a subchannel forming member having a channel in communication with an inlet-outlet port formed in the other valve.

Shutoff-opening device

A pipe joint thrust ring to be interposed between a joint member of a pipe joint and a connecting threaded member rotatably fitted to the joint member. The thrust ring comprises a C-shaped body in the form of a circle partly cut away and having spring elasticity. The inner width between opposed ends of the C-shaped body is maller than the outside diameter of the joint member and can be increased to a value equal to the outside diameter of the joint member.

Thrust ring for pipe joints

Growing community of inventors

Osaka, Japan

Naoya Masuda