Sumitomo Electric Industries, Limited

Naoya Kono

Hideki Yagi

Takamitsu Kitamura

Masataka Watanabe

Akira Furuya

Tsutomu Ishikawa

Hirohiko Kobayashi

Naoki Fujiwara

Mitsuru Ekawa

Keiji Tanaka

Hiroki Mori

Taizo Tatsumi

Chie Fukuda

Naoki Itabashi

Yasuyuki Yamauchi

Kazuhiro Yamaji

Ryuji Masuyama

Takehiko Kikuchi

Naoko Konishi

Daisuke Kimura

Kazuhiko Horino

Takuo Hiratani

Morihiro Seki

Hajime Tanaka

Jun Otsuka

Makoto Ogasawara

An optical modulator includes a first mesa waveguide extending in a first direction, and a second mesa waveguide. The first mesa waveguide includes a p-type first semiconductor layer disposed over a substrate, a core layer disposed over the first semiconductor layer, a p-type second semiconductor layer disposed over the core layer, and an n-type third semiconductor layer disposed over the core layer. The second semiconductor layer and the third semiconductor layer are arranged adjacent to each other in the first direction. An electrode is disposed over the third semiconductor layer. A joining surface between the second semiconductor layer and the third semiconductor layer is inclined with respect to a surface orthogonal to the first direction.

Optical modulator and method of manufacturing optical modulator

The light modulator includes a substrate having a main surface including a first area, a second area, and a third area, a first III-V compound semiconductor layer of a first conductivity-type provided on the first area, a second III-V compound semiconductor layer of a first conductivity-type or a second conductivity-type provided on the second area, a core provided on the third area and including a group III-V compound semiconductor, and an electrode connected to the first III-V compound semiconductor layer. The first III-V compound semiconductor layer includes a first portion having a thickness smaller than a thickness of the core in a second direction orthogonal to the main surface and a second portion having a thickness larger than the thickness of the first portion in the second direction. The second portion is disposed between the first portion and the core.

Light modulator

A method for manufacturing an optical modulator is disclosed. The optical modulator includes a Mach-Zehnder modulator, the Mach-Zehnder modulator including an electrode and an arm waveguide, the electrode being provided on the arm waveguide. The method includes a step of preparing the Mach-Zehnder modulator, a step of acquiring a relationship between a voltage applied to the electrode and a phase change amount of light propagating through the arm waveguide based on a light transmittance in the arm waveguide, a step of acquiring a voltage in which a range of a phase change amount of light in the Mach-Zehnder modulator has a predetermined range based on the relationship, and a step of storing the voltage in a storage unit.

Method for manufacturing optical modulator, testing method, non-transitory storage medium, and light transmission apparatus

A semiconductor optical device in which a light emitting region that emits light and a reflecting region that reflects the light to the light emitting region side are integrated includes a core layer that is provided in the light emitting region, and a waveguide layer that is provided in the reflecting region, that is optically coupled to the core layer, and that has a band gap that is larger than energy of the light. The reflecting region has a first thyristor that overlaps the waveguide layer in a direction that intersects a propagation direction of the light.

Semiconductor optical device and method of manufacturing the same

An optical modulator includes a substrate having a main surface including a first area and a second area, an optical modulation portion disposed on the first area, and an optical waveguide portion disposed on the second area. The optical modulation portion includes a first mesa waveguide and an electrode connected to the first mesa waveguide. The first mesa waveguide includes a p-type semiconductor layer, a first core layer, and an n-type semiconductor layer. The optical waveguide portion includes a second mesa waveguide. The second mesa waveguide includes a first cladding layer, a second core layer, and a second cladding layer. The second core layer is optically coupled to the first core layer. The first cladding layer contains a p-type dopant and protons. The second cladding layer contains an n-type dopant.

Optical modulator

A method for manufacturing an optical modulator is disclosed. The method includes a step of preparing a Mach-Zehnder modulator, a step of acquiring, based on a light transmittance in an arm waveguide, a relationship between a voltage applied to an electrode and a phase change amount of light propagating through the arm waveguide, a step of acquiring, based on the relationship, a voltage in which the phase change amount of the light propagating through the arm waveguide has a predetermined when the light is modulated, and a step of storing the voltage in a storage unit.

A semiconductor device includes: a semiconductor layer formed on a substrate; a first resin layer formed on the semiconductor layer; a second resin layer formed on the first resin layer; a first wiring layer that is formed on the semiconductor layer and is buried in the second resin layer; a second wiring layer that is formed on the second resin layer and the first wiring layer, and is electrically connected to the first wiring layer; and a first inorganic insulating film covering the second resin layer and the second wiring layer, wherein an area of the first wiring layer is larger than an area of the second wiring layer.

Semiconductor device and method of manufacturing the same

An optical modulator includes an input waveguide having a first width enabling a propagation of a light-beam in a single-mode, a tapered waveguide having an input end connected to the input waveguide and an output end having a second width larger than the first width, an optical demultiplexer having an input port connected to the output end, a first output port connected to a first arm waveguide, and a second output port connected to a second arm waveguide connected to the second output port, a first electrode disposed on the first arm waveguide, and a second electrode disposed on the second arm waveguide. The first arm waveguide has a third width larger than the first width. The first arm waveguide is located within a first strip region. The first strip region having a fourth width twice as large as the third width.

A Mach-Zehnder modulator includes: first and second resistive elements each having first and second contact areas, the first and second contact areas of the first resistive element being arranged in a direction of a first axis, the first and second contact areas of the second resistive element being arranged in a direction of a second axis; a common conductor connecting the first contact areas of the first and second resistive elements with each other; first and second waveguide structures each including a waveguide portion extending in a direction of a third axis intersecting the first and second axes; a first signal conductor connected to the waveguide portion of the first waveguide structure and the second contact area of the first resistive element; and a second signal conductor connected to the waveguide portion of the second waveguide structure and the second contact area of the second resistive element.

Mach-Zehnder modulator

A spot-size converter includes: a support body that includes a main surface including a first to a fifth areas; a mesa structure that includes a first part on the first area and includes a second part on the second to the fourth areas; and an embedding structure that includes a first region and a second region in which a first and a second side-surfaces of the second part of the mesa structure are respectively embedded. The second part of the mesa structure includes a portion that has a width gradually decreasing in a direction from the third area toward the fifth area. The first region of the embedding structure extends along the first side-surface and terminates at one of the third and the fourth areas. The second region of the embedding structure extends along the second side-surface of the second part and is disposed on the fifth area.

Asymmetrical spot-size converter and method of manufacturing spot-size converter

A Mach-Zehnder modulator includes: a first semiconductor arm including a lower semiconductor region, an upper semiconductor layer, and a core layer disposed between the lower semiconductor region and the upper semiconductor layer; a second semiconductor arm including a lower semiconductor region, an upper semiconductor layer, and a core layer disposed between the lower semiconductor region and the upper semiconductor layer; a conductive semiconductor region connecting the lower semiconductor regions of the first and second semiconductor arms with each other; and a differential transmission line including a first signal transmitting conductor, a second signal transmitting conductor, and a reference potential conductor. The first and second signal transmitting conductors are coupled to the first and second semiconductor arms, respectively. The reference potential conductor extends on the conductive semiconductor region between the first and second signal transmitting conductor and the second signal transmitting conductor, and is isolated from the conductive semiconductor region.

Mach-Zehnder modulator, light modulating apparatus

A Mach-Zehnder modulator includes an optical waveguide, first and second arm waveguides, an embedded area, an conductive semiconductor layer, first and second signal upper layers extending over the embedded area and connected to the first and second arm waveguides, a first ground upper layer extending over the embedded area along at least one of the first and the second signal upper layers, a ground lower layer connected to the first ground upper layer and extending through the embedded area along the and second first signal upper layers, and a first conductive upper layer connected to the ground lower layer and extending over the embedded area along at least one of the first and second signal upper layers. The ground lower layer extends between the optical waveguide, the first signal upper layer, and the second signal upper layer.

A Mach-Zehnder modulator includes: a first arm waveguide having first to third waveguide portions, the third waveguide portion being curved to couple the first and second waveguide portions with each other; a second arm waveguide having first to third waveguide portions, the third waveguide portion being curved to couple the first and second waveguide portions with each other, and a differential signal conductor having first and second signal conductors for driving the first and second arm waveguides, respectively. The first signal conductor has a first conductor portion and a first intersecting conductor portion connected thereto. The second signal conductor has a first conductor portion and a second intersecting conductor portion connected thereto. One of the first and second intersecting conductor portions includes an upper conducting layer, and the other includes a lower conducting layer. The upper conducting layer extends on the lower conducting layer apart therefrom.

Mach-zehnder modulator

A spot size converter includes: a first semiconductor waveguide structure having a first width enabling single mode propagation; a second semiconductor waveguide structure having a second width greater than the first width, a second semiconductor waveguide structure including an end face for optically coupling with an external waveguide; a third semiconductor waveguide structure having a third width greater than the first and second widths, the third semiconductor waveguide structure being optically coupled to the second semiconductor waveguide structure; and a single tapered waveguide having a first end portion connected to the third semiconductor waveguide structure, and a second end portion connected to the first semiconductor waveguide structure, the single tapered waveguide having a width gradually changing in a direction from the first end portion to the second end portion.

Spot size converter, semiconductor optical device

A Mach-Zehnder modulator includes: a support having a principal surface, the principal surface having a first area, a second area, and a third area; a first structure including first and second semiconductor mesas disposed on the first and second areas, respectively; a second structure including a first strip-shaped semiconductor region on the second area, a second strip-shaped semiconductor region on the third area, and a first strip-shaped void and a second strip-shaped void defining the first and second strip-shaped semiconductor regions; a first electrode disposed on the first semiconductor mesa in the first area, the first strip-shaped semiconductor region of the second structure being disposed between the support and the second semiconductor mesa of the first structure in the second area, and the first and second semiconductor mesas, and the first and second strip-shaped semiconductor regions being arranged to constitute a first arm waveguide of the Mach-Zehnder modulator.

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Yokohama, Japan

Naoya Kono