Sii Crystal Technology Inc.

Naoya Ichimura

Takashi Kobayashi

There is provided a wafer making it possible to stably break off the piezoelectric vibrator element. The wafer includes a piezoelectric vibrator element, a frame part, and a connection part adapted to connect the piezoelectric vibrator element and the frame part to each other, and the connection part is provided with a guide part adapted to guide force, which is applied to the connection part from one surface side in the thickness direction of the connection part when breaking off the piezoelectric vibrator element from the frame part at the connection part, to at least one side in the width direction of the connection part.

Wafer, piezoelectric vibrator element, and piezoelectric vibrator

There is provided a method of manufacturing a piezoelectric vibrator element capable of preventing the piezoelectric vibrator element from being damaged when segmentallizing the piezoelectric vibrator element. The method of manufacturing a piezoelectric vibrator element includes the steps of providing the wafer with the piezoelectric plate and a frame part adapted to support the piezoelectric plate via a connection part, providing a pair of excitation electrodes to the piezoelectric plate, and forming a pair of extending electrodes extending from the piezoelectric plate to the frame part through the connection part and electrically connected respectively to the pair of excitation electrodes, and segmentallizing the piezoelectric plate by cutting the connection part. In the step of providing the pair of excitation electrodes, the pair of extending electrodes are formed on a side surface of the connection part.

Method of manufacturing piezoelectric vibrator element

A piezoelectric vibrator element includes a pair of vibrating arms extending from a base, and having a groove on each of opposing principal surfaces in the longitudinal direction of the vibrating arms. Two systems of excitation electrodes are included on the side surfaces and the opposing principal surfaces, and in the grooves of the vibrating arms. A width of a bank part formed by a side surface of the vibrating arms and a side surface of the groves is W, and the separation distance between the excitation electrodes on the opposing principal surfaces is W, such that 1 &#x3bc;m&#x3c;W&#x3c;3 &#x3bc;m and W&#x3e;W

Piezoelectric vibrator element, and piezoelectric vibrator

The piezoelectric vibrator element is miniaturized, and at the same time, the vibration leakage is suppressed. The piezoelectric vibrator element is formed so that the total length Lof the piezoelectric vibrator element, the length Lof the base, the width Lof the connection part, the length Lof the support arm part fulfill all of the following conditions A through C, Condition A: 0.1&#x2266;L/L&#x2266;0.2, Condition B: 0.4&#x2266;L/L&#x2266;0.6, Condition C: L/L&#x2267;0.7. While the miniaturization is realized by shortening the base due to the condition A, the distance via the base can be elongated due to the condition B. Further, by increasing the length of the support arm parts due to the condition C, it is possible to increase the total mass of the path transmitting the vibration to absorb the vibration to thereby further suppress the vibration leakage.

A pair of vibrating arm portions are disposed lined up in a second direction perpendicular to a first direction and are configured such that base end sides thereof in the first direction are fixed to a base portion. A pair of inclined surfaces are formed on both sides in the second direction on the base end side of the vibrating arm portion so that a width of the vibrating arm portion in the second direction is gradually widened from the distal end side to the base end side. A length of a region, having the pair of inclined surfaces formed therein, in the first direction is set to equal to or greater than 0.25 times and equal to or less than 0.5 times of a total length of the vibrating arm portion from the base end to the distal end.

Piezoelectric vibrating piece and piezoelectric vibrator

A pair of vibrating arms are arranged side by side in a second direction crossing the first direction, base end sides of which in the first direction are fixed to the base, a pair of inclined surfaces are formed in both sides of the base end of the vibrating arm in the second direction, an end portion in the base end side of an inner inclined surface is connected to an end surface in the tip end side of the base, and an end portion in the base end side of an outer inclined surface is connected to an end surface of the base in the second direction, and the base-end side end portion of the outer inclined surface is arranged closer to the tip end side than the base-end side end portion of the inner inclined surface.

Growing community of inventors

Chiba, Japan

Naoya Ichimura