Seiko Epson Corporation

Naoto Yokoyama

Eiju Hirai

Motoki Takabe

Masao Nakayama

Koji Sumi

Toshihiro Shimizu

Takeshi Saito

Motohisa Noguchi

Yoichi Naganuma

Eiji Osawa

Chikara Kojima

Yasuhiro Itayama

Osamu Tonomura

Yoshihiro Hokari

Takashi Kasahara

Satoshi Takemoto

A plurality of individual electrodes each extending in a first direction are arranged in a second direction intersecting with the first direction. A piezoelectric actuator has a drive region where the individual electrode, a piezoelectric layer, and a common electrode overlap as viewed in a stack direction and a non-drive region, adjacent to the drive region, where the individual electrode, the piezoelectric layer, and the common electrode do not overlap as viewed in the stack direction. The individual electrode has a first portion included in the drive region and a second portion included in the non-drive region and located adjacent to the first portion in the first direction. The first portion includes a narrower portion whose width is less than a width in the second direction at a boundary between the first portion and the second portion.

Piezoelectric actuator, liquid ejecting head, and recording apparatus

Provided is a piezoelectric device including: a substrate () on which a plurality of recesses () are provided; a vibrating plate () which is provided on one surface side of the substrate; and a piezoelectric element () which is provided over the vibrating plate () and on which a first electrode (), a piezoelectric layer (), and a second electrode () are laminated from the substrate () side, in which the first electrode () is formed to have a first width which is smaller than a dimension of the recess in a parallel arrangement direction in the parallel arrangement direction of at least one recess (), and the piezoelectric layer () is extended to the outer side of the first electrode () in the parallel arrangement direction and has a second width which is greater than the first width and smaller than a width of the recess () in the parallel arrangement direction, the vibrating plate () contains a zirconium oxide layer (), and when an area of the zirconium oxide layer () corresponding to the first electrode having the first width is set as a first area (p), areas of the zirconium oxide layer () corresponding to areas where the piezoelectric layer () is provided on the outer side of the first area (p) in the parallel arrangement direction are set as second areas (q), and areas of the zirconium oxide layer () corresponding to the recess () on the outer side of the second areas (q) in the parallel arrangement direction are set as third areas (r), the zirconium oxide layer () contains particulate crystal in the first area (p) at least on the first electrode () side in the thickness direction and contains columnar crystal in the third areas (r).

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and manufacturing method of piezoelectric device

A liquid ejecting head includes a vibration plate constituting a part of a wall surface of a pressure chamber accommodating a liquid; a piezoelectric element vibrating the vibration plate; and a reinforcing film disposed on a surface of the vibration plate on a pressure chamber side, in which a vibration region, which is a region of the vibration plate and is vibrated by the piezoelectric element, has an elongated shape in a plan view viewed in a thickness direction of the vibration plate, and the vibration region includes a first region in which the reinforcing film is not disposed and a second region which is located at a position closer to a center of the vibration region in a longitudinal direction than the first region, and in which the reinforcing film is disposed.

Liquid ejecting head and liquid ejecting apparatus

A piezoelectric device includes a vibration plate, and a first piezoelectric element and a second piezoelectric element that vibrate the vibration plate. The first piezoelectric element and the second piezoelectric element include a piezoelectric layer extending between the first piezoelectric element and the second piezoelectric element. In a region between the first piezoelectric element and the second piezoelectric element in the piezoelectric layer, a first opening portion and a second opening portion are formed in a second direction intersecting a first direction in which the first piezoelectric element and the second piezoelectric element are disposed so as to interpose a vibration suppressing portion, which is a portion of the piezoelectric layer.

Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric device includes a pressure chamber forming substrate in which a pressure chamber empty portion is formed, a vibrating plate that is formed on the pressure chamber forming substrate, corresponding to the pressure chamber empty portion, and a piezoelectric element that is formed on the vibrating plate, corresponding to the pressure chamber empty portion, in which the vibrating plate is provided with a concave portion having a bottom portion which is overlapped with the pressure chamber empty portion, and is larger than the pressure chamber empty portion in a planar view, and a wall portion which surrounds the bottom portion, on the pressure chamber empty portion side, the wall portion has a curved surface that is inclined to widen in a direction toward the pressure chamber empty portion from the bottom portion, and a curvature radius of the curved surface is 60 nm to 1000 nm.

Piezoelectric device, liquid discharge head, and liquid discharge apparatus

A liquid ejecting head includes a flow path substrate in which a nozzle through which liquid is ejected, a pressure chamber that communicates with the nozzle and a liquid supply chamber that communicates with the pressure chamber are formed, a vibration plate that is installed on the flow path substrate and overlaps with the pressure chamber and the liquid supply chamber, and a piezoelectric element that is formed on the vibration plate on an opposite side from the pressure chamber, in which a portion of the vibration plate overlapping with the pressure chamber is thinner in a thickness than a portion of the vibration plate overlapping with the liquid supply chamber.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device

A piezoelectric device including a pressure chamber, a piezoelectric element, and a vibration plate, in which the piezoelectric element is provided with a first electrode, a second electrode, and a piezoelectric layer, the vibration plate has a first portion overlapping the piezoelectric element and a second portion having a thickness smaller than that of the first portion and overlapping an inner peripheral surface of a side wall of the pressure chamber, a side surface of the piezoelectric element which intersects the vibration plate has a first surface inclined at a first angle, the vibration plate has a second surface, between the first portion and the second portion, inclined at a second angle smaller than the first angle, and an end portion of the second surface on the side wall side of the pressure chamber overlaps the side wall of the pressure chamber.

Provided is a piezoelectric element including: a first electrode; a piezoelectric layer which is provided over the first electrode; and a second electrode provided on a side of the piezoelectric layer opposite to the first electrode, in which the second electrode includes a first layer which is provided on the piezoelectric layer side, and a second layer which is provided on a side of the first layer opposite to the piezoelectric layer, and the second layer does not contain platinum and covers an end portion of the first layer.

Piezoelectric element, liquid ejecting head, and piezoelectric device

The piezoelectric body is configured to have a layered structure such that a plurality of unit layers are stacked in a film thickness direction, and each of the unit layers is formed of a first layer on which the displacement is relatively easy to occur, and a second layer which has a high concentration of Zr as compared with the first layer. In addition, when composition ratio Ti/(Zr+Ti) of Zr to Ti in each of the first layer and the second layer is set as Cr1 and Cr2, the composition ratio of each layer is adjusted so as to satisfy the following conditions (1) to (3):0.41&#x2264;1&#x2264;0.81&#x2003;&#x2003;(1)0.1&#x2264;1&#x2212;2&#x2264;0.3&#x2003;&#x2003;(2)1&#x3e;2&#x2003;&#x2003;(3).

Piezoelectric element, liquid discharging head provided with piezoelectric element, and liquid discharging apparatus

Provided are a vibrating plate, a first electrode provided over the vibrating plate, a piezoelectric layer provided over the first electrode, and a second electrode provided over the piezoelectric layer are provided. The piezoelectric layer is interposed between the first electrode and the second electrode. The piezoelectric layer includes an active portion of which at least one end portion is defined by the first electrode, and a non-active portion provided on an outside of the end portion of the first electrode for defining the active portion. The vibrating plate includes a first vibration portion under the non-active portion and a second vibration portion on an outside of the first vibration portion. The second vibration portion includes a taper part having the thickness which is increased toward the first vibration portion.

Piezoelectric element, liquid ejecting head, and piezoelectric element device

A method for driving a piezoelectric element including a first electrode, a piezoelectric layer formed on the first electrode and containing a composite oxide of an ABOtype perovskite structure, and a second electrode formed on the piezoelectric layer, and the method includes driving the piezoelectric element by applying a signal having a predetermined driving waveform by a predetermined number of times, and driving the piezoelectric element by applying a signal having the predetermined driving waveform in reverse polarity.

Method for driving piezoelectric element, piezoelectric element, and piezoelectric element applied device

The piezoelectric body is configured to have a layered structure such that a plurality of unit layers are stacked in a film thickness direction, and each of the unit layers is formed of a first layer on which the displacement is relatively easy to occur, and a second layer which has a high concentration of Zr as compared with the first layer. In addition, when composition ratio Ti/(Zr+Ti) of Zr to Ti in each of the first layer and the second layer is set as Cr1 and Cr2, the composition ratio of each layer is adjusted so as to satisfy the following conditions (1) to (3).0.41&#x2266;Cr1&#x2266;0.81&#x2003;&#x2003;(1)0.1&#x2266;Cr1&#x2212;Cr2&#x2266;0.3&#x2003;&#x2003;(2)Cr1&#x3e;Cr2&#x2003;&#x2003;(3)

A piezoelectric actuator includes a vibrating plate having a base surface, a first electrode, a piezoelectric layer, and a second electrode which extends in a first direction. In the piezoelectric actuator, the second electrode has a first portion having a first width, a second portion having a second width which is smaller than the first width, and a third portion which connects the first portion and the second portion, the first electrode has a first side which forms an outer circumference of the first electrode on a plan view, and the third portion of the second electrode is arranged at an upper side of the first side of the first electrode and a third width of the third portion is made narrower from the first portion toward the second portion.

Piezoelectric actuator, liquid ejection head, and liquid ejection apparatus

A liquid ejecting head includes: a piezoelectric actuator having a first electrode, a piezoelectric body formed on the upper side of the first electrode, and a second electrode formed on the upper side of the piezoelectric body; and an electrostatic actuator having the second electrode and a third electrode arranged to face the second electrode with a space therebetween.

There is provided a piezoelectric actuator including: a substrate that is supported by a support portion; a piezoelectric element that includes a lower electrode formed on the substrate, a piezoelectric layer formed on the lower substrate, and an upper electrode formed on the piezoelectric layer; and a driving circuit that applies a voltage to the piezoelectric element. The upper electrode has a first upper electrode that is positioned on an outer peripheral side of the piezoelectric layer and at least one second upper electrode that is positioned on a center side of the piezoelectric layer, and a voltage applied to the first upper electrode is lower than a voltage applied to the second upper electrode.

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Matsumoto, Japan

Naoto Yokoyama