Nikon Corporation

Naoshi Aikawa

Yuki Yoshida

Kotaro Yamaguchi

Fumio Suzuki

Hisashi Okugawa

Masatoshi Sato

Hisao Osawa

Akira Adachi

Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a plane-parallel plate after light of unnecessary wavelength is removed by a filter. The plane-parallel plate is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

Laser scan confocal microscope

A line of sight detection device calibration method, which calibrates a line of sight detection device that measures movement of an eyeball of a subject wearing eyeglasses and detects a transmission point at which a line of sight of the subject passes through a lens of the eyeglasses based on a result of measurement, includes: a measurement step of measuring the movement of the eyeball of the subject in a condition in which a first baseline is arranged at a predetermined position relative to the lens of the eyeglasses and the first baseline reflected in a corner cube substantially corresponds to a second baseline of the corner cube; and a calibration step of calibrating the line of sight detection device based on a result of measurement by the measurement step.

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A confocal scanning microscope including: an objective system (second objective lensand objective lens) illuminating a sample SA with illumination light; a scanning mechanismscanning the sample SA to obtain an intensity signal; and a scanning optical systemprovided between the scanning mechanism and the objective system. The scanning optical system composed of, in order from the scanning mechanism side, a first positive lens group G1, a second negative lens group G2, and a third positive lens group G3. The third lens group has two chromatic aberration correction portions each formed by a positive lens and a negative lens or negative lens and positive lens. Glass materials are selected such that one performs chromatization and the other performs achromatization, thereby providing a confocal scanning microscope capable of correcting lateral chromatic aberration generated in the objective system in the specific wavelength region by the scanning optical system.

Confocal scanning microscope

Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror and comes into deflection system after light of unnecessary wavelength is removed by a filter. The deflection system is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

A confocal scanning microscope including: an objective system (second objective lensand objective lens) illuminating a sample SA with illumination light; a scanning mechanismscanning the sample SA to obtain an intensity signal; and a scanning optical systemprovided between the scanning mechanism and the objective system. The scanning optical system composed of, in order from the scanning mechanism side, a first positive lens group G, a second negative lens group G, and a third positive lens group G. The third lens group has two chromatic aberration correction portions each formed by a positive lens and a negative lens or negative lens and positive lens. Glass materials are selected such that one performs chromatization and the other performs achromatization, thereby providing a confocal scanning microscope capable of correcting lateral chromatic aberration generated in the objective system in the specific wavelength region by the scanning optical system.

The present application has a proposition to provide a highly efficient laser excitation fluorescent microscope. Accordingly, a laser excitation fluorescent microscope of the present application includes a laser light source part radiating at least two types of excitation lights having different wavelengths; a light collecting part collecting the two types of excitation lights on a sample; a high-functional dichroic mirror, disposed between the laser light source part and the light collecting part, reflecting the two types of excitation lights to make the excitation lights incident on the light collecting part, and transmitting two types of fluorescence generated at the sample; and a detecting part detecting light transmitted through the high-functional dichroic mirror, in which an incident angle &#x3b8; of the excitation lights and the fluorescence to the high-functional dichroic mirror satisfies a formula of 0&#xb0;&#x3c;&#x3b8;&#x3c;45&#xb0;.

Laser excitation fluorescent microscope

Fluorescence is generated from an irradiated point on an inspection surface of a sample and the fluorescence is collected by an objective lens. Here, because of the magnification chromatic aberration of the objective lens, the fluorescence going out from the objective lens travels along a path shifted from the irradiation light and changed substantially into a non-scan light by a galvano-scanner. The fluorescence passes through a dichroic mirror into a deflection system after light of unnecessary wavelength is removed by a filter. The deflection system is driven in synchronization with the galvano-scanner by a computer and corrects the shift and inclination of the optical axis generated by the magnification chromatic aberration of the objective lens. Then, the fluorescence forms an image of the irradiation point of the inspection surface of the sample on a pin hole of a pin hole plate by using a collective lens.

A multibeam type scanning microscope that has N beams, wherein the system is devised so that the respective beams perform scanning in Lstages in the Y direction at maximum magnification where the discrete scanning direction is the Y direction, thus performing scanning in an area of N&#xd7;Lstages overall, and scanning is controlled so that the following processes (1) and (2) are successively repeated Ltimes at a magnification that is 1/Ltimes the maximum magnification. Here, L, M and N are integers of 2 or greater, and K is a natural number.

Multibeam type scanning microscope

A spectroscope includes an optical fiber, a collimator optical systemfor collimating signal light come out from the optical fiber, a spectroscopic elementfor dispersing the signal light collimated by the collimator optical system, a detectorcomposed of a plurality of detector elementsdisposed at least in a direction of dispersion and detecting the light dispersed by the spectroscopic element, and a focusing optical systemfor focusing the signal light come out from the detectoronto a detecting surface of the detector. It is set such that the focusing optical systemmakes a diameter of a spot of the signal light focused on the detecting surface of the detectorsmaller than an arranged pitch of the detectorand a numerical aperture of the collimator optical systemis larger than that of the optical fiber

Optical fiber type spectroscope and spectroscope system equipped therewith

A confocal microscope includes a light source that emits illuminating light beam, an illuminating optical system that irradiates the illuminating light beam onto a specimen, a condensing optical system that condenses the light reflected off the specimen and a light detection unit. The light detection unit includes a mask member, a movable shutter and a light detector. The mask member includes a plurality of reflecting/transmitting surfaces each constituting a light separating surface, and only the central portion of the light flux entering the mask member from the condensing optical system exits through a pinhole. The movable shutter opens or closes off a plurality of pinholes individually, and the light detector detects the light flux having passed through the pinholes.

Confocal microscope

A spectroscope capable of suppressing the dimension and the cost with avoiding a problem caused by polarization dependency of the diffraction grating. The spectroscope includes a polarizing beam splitter platethat divides the light from an input fiberinto a first and a second optical paths and polarizes each light of each optical path having different direction of polarization with each other, a Fresnel rhomb half wave platethat arranges the direction of polarization of the light in the first optical path into that in the second optical path and a plane mirrorthat deflects the second optical path such that at least a portion of an area where the light through the first optical path is incident on the diffraction gratingand an area where the light through the second optical path is incident on the diffraction grating overlap each other.

Growing community of inventors

Fujisawa, Japan

Naoshi Aikawa