Sekisui Chemical Co., Ltd.

Naomichi Saito

Setsuo Nakajima

Osamu Nishikawa

Toshimasa Takeuchi

Yu Nagahara

Takaya Oshita

Yoshishige Takikawa

Tatsuya Matsuo

Masaki Iwasaki

An irradiator includes: a first electrode to which a voltage is applied for generating a plasma; and a holding member holding the first electrode; wherein: the holding member has a first member and a second member that are in contact with each other to constitute an accommodation space accommodating the first electrode; and a contact surface between the first member and the second member includes a non-perpendicular contact surface that is non-perpendicular to an axis of the first electrode.

Holding member, irradiator, and plasma apparatus

To provide a plasma processing apparatus capable of enhancing insulation between an electrode and a casing and adjusting the temperature of the electrode from outside. An electrodeis provided at its discharge space forming surface with a solid dielectric. The electrodeis received in a casingsuch that the solid dielectricon the discharge space forming surface is exposed. An in-casing spacebetween the casingand the electrodedisposed in the casingis filled with substantially pure nitrogen gas. This nitrogen gas pressure is more increased than the pressure in the discharge space. Preferably, nitrogen gas is allowed to flow.

Plasma processing apparatus

To prevent occurrence of arcing caused by difference of thermal expansion between the electrode and the solid dielectric in a plasma processing apparatus. The bottom part of a casingof processing unitsL,R is open, this opening part is closed with a solid dielectric plate, and an electrodeis received in the casingsuch that the electrodeis free in the longitudinal direction. The solid dielectric platehas such strength as capable of supporting the dead weight of the electrodesolely by itself. The electrodeis placed on the upper surface of the solid dielectric plateis a non-fixed state such that the dead weight of the electrodeis almost totally applied to the solid dielectric plate

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Hachioji, Japan

Naomichi Saito