Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Naoko Matsuda

Hiroyuki Naka

Hiroshi Ogura

Masayoshi Miura

Daido Komyoji

Akira Kumon

Akira Fukano

Katsutoshi Ogawa

Osamu Hirota

Keinosuke Kanashima

Mikio Hirano

Tatsuhiro Otsubo

Shigeru Ohki

Katsuhito Uematsu

Motoaki Kamihara

A dust-exhaust acceleration face of a dust-exhaust assistant member is disposed so as to face a top face of a heat radiating member of a production facility or the like so that a gap between the top face of the heat radiating member and the dust-exhaust acceleration face of the dust-exhaust assistant member is occupied by ascending air flows, each having a falling velocity (terminal velocity) that is not accelerated beyond a fixed velocity, to form a balanced state between the size of an object, such as a dust particulate or a chemical substance particulate, and air resistance when the object is freely falling in the air; thus, the object, such as a dust particulate and a chemical substance particulate, is prevented from falling onto the heat radiating member.

Clean room

A method for forming a pattern on a surface of a panel substrate, includes electrically charging pattern-forming material particles, jetting out the electrically charged pattern-forming material particles through a nozzle by applying electrostatic force to the pattern-forming material particles to form a pattern, and fixing the pattern onto the panel substrate.

Method and apparatus for forming pattern onto panel substrate

A dust collector for a laser drilling machine is provided between a lens table and a workpiece to be processed and includes an upper inlet port and a lower inlet port arranged on one side of a space defined by four side walls, and an exhaust port arranged opposite the inlet ports. The total amount of air supplied from the two inlet ports is 30 to 70% of the exhaust rate. The lower inlet port has an air supply capacity 1.5 to 4.5 times that of the upper inlet port.

Laser drilling machine and method for collecting dust

The present invention provides an apparatus which is capable of discharging a process liquid to a rotating substrate at a very constant rate irrespective of variations in the state of the process liquid. A process liquid is discharged toward a rotating substrate by nozzles which are moved from inner to outer radius sides of the rotating substrate. The present invention further provides a method in which film thickness control conditions are determined based on a simulation of a behavior of a process liquid on a substrate.

Method and apparatus for determining film thickness control conditions

A rotary driving device for rotating an object to be rotated, is manufactured by a process of rotating a turntable, for loading the object to be rotated thereon, mounted to a driving part and thereby generating a surface vibration because of rotation of the turntable, and a process of forming a surface vibration absorber part on the turntable corresponding to an amount of the surface vibration.

Rotary driving device having a surface vibration absorber part with a

An apparatus, for forming a film, includes an ink jet head having a plurality of nozzles for discharging a liquid, a rotating device for rotating about a rotary axis a coating-object substrate onto which liquid discharged from the ink jet head is deposited, a relatively moving device for moving the ink jet head and the coating-object substrate relatively to each other between a nearby region of the coating-object substrate near the rotary axis and a separate region of the coating-object substrate separate from the rotary axis, and a relative movement control device for controlling the relatively moving device so that an angular velocity of rotation by the rotating device is reduced responsively as a relative position of the ink jet head and the coating-object substrate therebetween makes relative movement from the nearby region toward the separate region, and an angular velocity of rotation by the rotating device is reduced responsively as the relative position of the ink jet head and the coating-object substrate therebetween moves relatively from the nearby region toward the separate region.

Apparatus and method for forming films

In a method of minimizing the temperature difference on a large area plate in a sintering step of manufacturing a solar cell and using a cover for making the heat equal, a cover with the hole pitch and the hole location being set in it is used in an analysis to quantitatively determine the cover shape for realizing the equal-heat heating, whereby the heat equalizing operation of the plate can be realized.

Growing community of inventors

Hirakata, Japan

Naoko Matsuda