Shimadzu Corporation

Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Denki Kabushiki Kaihsa

Naoki Yoshioka

Akira Yamada

Fusaoki Uchikawa

Shigeru Matsuno

Shoji Miyashita

Tatsushi Kawamoto

Mitsushi Kawao

Seiji Ito

In a liquid substance supply device, a three port two valve directional control valve is provided in a transfer line, and a substance container and the transfer line are connected together by a four port three valve directional control valve in such a way that the four port three valve directional control valve and the substance container can be removed from the transfer line as a unit. Furthermore, in a vaporizer, an orifice member is provided to surround the end portion of an internal conduit in which flows a mixture substance consisting of a gas and a liquid substance mixed therewith, and gas for atomization is spouted into a vaporization chamber through a gap defined between the internal conduit and the orifice member. Yet further, the temperature of a vaporization surface in the vaporization chamber can be controlled independently in correspondence with the nature of the liquid substance.

Liquid substance supply device for vaporizing system, vaporizer, vaporization performance appraisal method

Liquid substance supply device for vaporizing system, vaporizer, and vaporization performance appraisal method

The object of the invention is to provide a unit for vaporizing liquid materials which can adjust not only a mixing rate but also a concentration of the mixed liquid easily and accurately and which can effectively vaporize a large amount of the liquid material. A unit for vaporizing liquid materials in accordance with the invention is for mixing a plurality of liquid materials and comprises a plurality of containers each of which contains a different liquid material which is made by dissolving a material into a solvent, a container exclusive for solvent which contains the same or the same kind of solvent used for the liquid materials, a liquid conveying means which conveys the liquid materials from the containers and the solvent from the container exclusive for solvent, and a vaporizing means which sprays the liquid materials and the solvent conveyed by the liquid conveying means and vaporizes the sprayed liquid materials and the sprayed solvent.

Unit for vaporizing liquid materials

Growing community of inventors

Hadano, Japan

Naoki Yoshioka