Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Hitachi-Kokusai Electric Inc. (1 from 1,258 patents)
2. Kokusai Electric Corporation (1 from 612 patents)
2 patents:
1. 10755962 - Substrate processing apparatus and method of manufacturing semiconductor device
2. 9305820 - Substrate processing apparatus and method of manufacturing semiconductor device