Tokyo Electron Limited

Tokyo Electron Limi Ted

Naoki Taniguchi

Hiroshi Tsujimoto

Kumiko Ono

Shinichi Kozuka

Takao Funakubo

Wataru Ozawa

Hirofumi Haga

Akihiro Sakamoto

A controller disclosed herein drives, in a first step, a high frequency generating source at a first energy condition, and drives, in a second step, a high frequency generating source at a second energy condition. Prior to a switching time of the first step and the second step, the controller switches gas species supplied from the gas supply system into the processing container, and sets a gas flow rate in an initial period just after the switching to be larger than a gas flow rate in a stabilization period after lapse of the initial period.

Plasma processing apparatus and plasma processing method

Growing community of inventors

Miyagi, Japan

Naoki Taniguchi