Hitachi High-Tech Corporation

Naoki Samura

Tsunenori Nomaguchi

Shinsuke Kawanishi

Yasuhiko Nara

Yaku Maeda

A probe device includes a sample stagethat supports a sample, a probe unitto which a probebrought into contact with a predetermined sample surface of the sample is attached, a first cameraA that images the sample and the probe, and a first camera optical axis adjustment stageA that adjusts an optical axis of the first camera, in which the optical axis of the first camera is parallel to the sample surface, and the first camera optical axis adjustment stage allows the optical axis of the first camera to be moved in a direction perpendicular to the sample surface.

Probe device

Tweezers, which can grip a sample piece, includes a gripping memberand a gripping member. The gripping memberincludes a gripping regionand an abutment region, and the gripping memberincludes a gripping regionand an abutment region. The gripping regionand the gripping regioninclude a gripping surface SFand a gripping surface SFfor gripping the sample piece, respectively. The abutment regionprotrudes from the gripping regionin a direction directed from the gripping surface SFto the gripping surface SF, and the abutment regionprotrudes from the gripping regionin a direction directed from the gripping surface SFto the gripping surface SF

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Tokyo, Japan

Naoki Samura