Sumitomo Precision Products Co., Ltd.

Naoki Okimoto

Ryohei Uchino

Takafumi Moriguchi

Mario Kiuchi

A vibrating-type gyroscope element includes a fixed part, a resonator having a vibration mode of cos Nθ (N is a natural number of two or more), support parts, and electrodes. The electrodes are arranged in 4N orientations arranged in an outer circumferential direction of the resonator. The electrodes include at least one primary driving electrode and at least one secondary pickoff electrode. A relationship U≥1 or (S1+S2)−2≥|S1−S2| is satisfied, where S1 is the number of cases where a secondary pickoff electrode is clockwise adjacent to a primary driving electrode, S2 is the number of cases where a secondary pickoff electrode is anticlockwise adjacent to a primary driving electrode, and U is the number of the secondary pickoff electrodes being neither clockwise nor anticlockwise adjacent to a primary driving electrode.

Vibrating-type gyroscope element and angular velocity sensor including same

A vibrating-type gyroscope element includes a fixed part, a resonator having a cos Nθ (N is a natural number of two or more) mode of vibration, support parts, and electrodes. The electrodes are arranged in 4N orientations arranged in an outer circumferential direction of the resonator. The electrodes include a primary driving electrode, a primary pickoff electrode, a secondary pickoff electrode, and a secondary driving electrode. The primary pickoff electrode is arranged in the same orientation as that of the primary driving electrode, and the secondary driving electrode is arranged in the same orientation as that of the secondary pickoff electrode.

Vibrating-type gyroscope element and angular velocity sensor comprising same

A MEMS element includes a substrate, a fixing portion provided at the substrate, first and second actuators provided at the fixing portion, a drive target member coupled to the first and second actuators, a third actuator provided at the fixing portion, and a restriction member coupled to the third actuator. The first and second actuators drive the drive target member in a direction parallel to or crossing an upper surface of the substrate. The third actuator drives the restriction member in a direction crossing a movement direction of the drive target member to position the restriction member within a movement plane of the drive target member such that the restriction member restricts displacement of the drive target member.

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Hyogo, Japan

Naoki Okimoto