Kobe Steel, Ltd.

Naoki Ohba

Hiroshi Tamagaki

Yoshimitsu Ikari

Takeshi Sakurai

A glass film transfer apparatus includes a wind-off section that winds off the glass film from a roll around which the glass film is wound, a long interleaf being laminated on the glass film; a glass film transfer section that transfers the glass film which is wound off from the wind-off section and is separated from the interleaf; a take-up section that takes up the glass film transferred by the glass film transfer section in the form of roll, while laminating the long interleaf on the glass film; and an interleaf transfer section that carries out the interleaf separated from the glass film which is wound off from the wind-off section, and carries in the interleaf toward the take-up section. Furthermore, the glass film transfer apparatus includes a take-up adjusting mechanism that adjusts a take-up state of the interleaf and the glass film in the take-up section.

Glass film transfer apparatus

Provided is a substrate transport roller () capable of ensuring a broad temperature-control region on a substrate, without reducing substrate transport quality. This substrate transport roller () is provided in a film-forming device () for executing a film-forming process on the surface of a film substrate (W), transports the film substrate (W) by rotating around a center axis, and is equipped with: a center-section segment () positioned in the center section in the axial direction extending along the center axis, and having a first outer-circumferential surface; end-section segments () positioned on both sides on the outside in the axial direction of the center-section segment (), and each having a second outer-circumferential surface which contacts the substrate (W) and has a larger diameter than that of the first outer-circumferential surface; a center-section-rising-falling-temperature-medium mechanism for changing the temperature of the center-section segment (); and a both-end-section-rising-falling-temperature mechanism for changing the temperature of each of the end-section segments () independently from the center-section segment ().

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Takasago, Japan

Naoki Ohba