Canon Kabushiki Kaisha

Naoki Murasato

Ken Minoda

Byung-Jin Choi

Yoshikazu Miyajima

Takafumi Miyaharu

Mahadevan Ganapathisubramanian

An imprint apparatus for forming a pattern of an imprint material on a substrate by using a mold including a pattern formation area, the imprint apparatus includes a detection unit configured to detect a contact state of the imprint material on the substrate with the mold, a light modulation element configured to control an intensity distribution of irradiation light irradiating the substrate, and a control unit configured to control a timing of irradiating the substrate with the irradiation light having the intensity distribution controlled by the light modulation element based on a detection result of the detection unit.

Imprint apparatus, imprinting method, and product manufacturing method

An imprint apparatus cures an imprint material by irradiating the imprint material with light while the imprint material on a substrate is in contact with a pattern region of a mold. The imprint apparatus includes a first supply unit configured to supply a first gas to a gap between the substrate and the mold, the first gas accelerating filling of recessed portions of the pattern region with the imprint material, and a second supply unit configured to supply a second gas to the gap, the second gas inhibiting curing of the imprint material.

Imprint apparatus, imprint method, and article manufacturing method

An imprint apparatus cures an imprint material on a shot region of a substrate by light irradiation and forms a pattern on the shot region in a state in which a mold is in contact with the imprint material. The apparatus includes a shutter mechanism including a shutter plate configured to control light irradiation to the imprint material on the shot region and an actuator configured to drive the shutter plate, and a driving mechanism configured to change relative positions of the substrate and the mold. The shutter plate includes a first passing portion configured to irradiate a part out of a whole of the imprint material on the shot region with light and a second passing portion configured to irradiate the whole of the imprint material on the shot region.

Imprint apparatus, imprint method, and method of manufacturing article

An imprint apparatus for forming a pattern in an imprint material on a substrate using an original as a mold, comprises an ultraviolet light generation device which irradiates with ultraviolet light which is curing light for curing the imprint material, and a control unit which controls a light amount of the ultraviolet light which is curing light. The control unit configured to perform a control of the light amount of the ultraviolet light acquires data of a defect distribution of the pattern formed on the substrate by the mold, and performs the control of the light amount of the ultraviolet light in a plurality of shot areas on the substrate based on the acquired data of the defect distribution.

Imprint apparatus, control method, and method for manufacturing article

A mold includes a pattern portion in which a pattern is formed, and a concave portion formed in the back surface of the pattern portion and having a size to include the pattern portion in a planar view. The edge of the pattern portion has an almost rectangular shape in the planar view. The concave portion has an almost rectangular shape with four rounded corners in the planar view. The shortest distance from each point on a side of the edge of the pattern portion to the edge of the concave portion is constant.

Mold, imprint apparatus, and method of manufacturing article

A holding apparatus includes a holding member configured to hold an optical element, the holding member having an internal space that extends in a circumferential direction and has different sectional shapes perpendicular to the circumferential direction on at least two locations, a fixing member arranged outside of the holding member and configured to fix the holding member from an outside of the holding member, and a pressing member configured to press the internal space by supplying a fluid to the internal space, and to deform the holding member.

Holding apparatus and exposure apparatus

A holding system for holding an optical element. The holding system includes a ring-like inner holding member disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, and a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points. The inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators.

Optical element holding system, barrel, exposure apparatus, and device manufacturing method

A holding system for holding an optical element. The holding system includes a ring-like inner holding member, disposed at an outer periphery of the optical element, for supporting the optical element by use of at least a pair of pieces, in which the inner holding member has at least a pair of driving units with an actuator, for supporting the optical element through the actuators, a ring-like outer holding member disposed at an outer periphery of the inner holding member and connected to the inner holding member at plural points, and three elastic members for supporting the holding member. The inner holding member supports the optical element by use of one pair of the pieces, which are disposed opposed to each other, in which one pair of the driving units of the inner holding member is disposed opposed to each other and provided on the inner holding member at two points. Each point is defined between the one pair of opposed pieces. The one pair of driving units is operable to apply a force to the optical element. The three elastic members are provided between the outer holding member and the inner holding member and symmetrically with respect to one of (i) a line that connects the one pair of opposed pieces with each other and (ii) a line that connects the one pair of opposed driving units with each other.

A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element based on the deformation amount.

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Utsunomiya, Japan

Naoki Murasato