Cambridge Filter Corporation

Naoji Iida

Toshiro Kisakibaru

Kouta Ueno

Makoto Yoshida

Nobuyuki Uesugi

Provided is a soft X-ray static electricity removal apparatus that has achieved an increase in the amount of ionized air discharged, with a simple structure. A soft X-ray static electricity removal apparatus () includes a soft X-ray generation device (), a container (), a soft X-ray shielding sheet (), and an insulating layer (). The soft X-ray generation device generates soft X-rays (). The container () has an outlet () from which ionized air () that has been ionized with the soft X-rays flows out. The soft X-ray shielding sheet () is used at the outlet of the container and includes a first outer sheet (), an interlayer sheet (), and a second outer sheet () which are formed of a material opaque to the soft X-rays. The first outer sheet has supply ports () for the ionized air formed therein; the interlayer sheet has an ionized air passage () formed therein, which includes ionized air inlet openings () that communicate with the supply ports; and the second outer sheet has a discharge port () formed therein, which communicates with the ionized air passage. The supply ports, the ionized air passage, and the discharge port communicate with each other to provide an ionized air transmission portion (). The insulating layer insulates the soft X-ray shielding sheet and the container from each other.

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Tokyo, Japan

Naoji Iida