Mitutoyo Corporation

Naoji Horiuchi

Soichi Kadowaki

Tomonori Goto

Jyota Miyakura

Fumihiro Takemura

A correction method for correcting measurement error in data obtained when a stylus tip of a measurement apparatus that moves following the height of a workpiece traces the workpiece along a measurement axis, the measurement error having occurred due to stylus movement in a plane defined by the measurement axis and height directions, the method includes a calibration measurement process of obtaining calibration measurement data that includes shift information on the position of the stylus tip, corresponding to the position of the stylus tip in the height directions while the stylus is moved in the correction target plane and a correction-parameter setting process obtaining a correction parameter value optimal to correct the shift information on the position of the stylus tip, included in the calibration measurement data, for each of the sectors obtained by dividing a measurement range in the height directions.

Correction method, computer-readable recording medium storing computer-executable correction programs and measurement apparatus

Method for determining a coordinate system including a preliminary measurement step in which a detector of a coordinate measuring apparatus is used to scan first measurement areas of the device to obtain position coordinate information and the detector is used to scan a second measurement area that is not on a straight line connecting the first measurement areas to obtain position coordinate information; a feature-point detection step of obtaining the position of a feature point in each of the measurement areas according to a result of measurement; a reference-line determination step of obtaining a first reference line according to the position of each feature point in the first measurement areas, and obtaining a second reference line perpendicular to the first reference line and passing through a feature point located in the second measurement area; an origin-setting step; and an axis setting step.

Method for determining coordinate system for device under measurement, and coordinate measuring apparatus

The measurement data fairing method includes: determining an interval in which a geometrical element is to be fitted to measurement data; extracting, from the data, interval measurement data of the fitting interval and robustly fitting the element; removing, on the basis of a result of the robust fitting, outlier from the interval measurement data; computing a statistic of a residual of the interval measurement data after the outlier removing step; and removing, as invalid data, measurement data that exceeds a predetermined limit value of the statistic of the residual from the interval measurement data after the outlier removing step on the basis of the statistic of the residual computed in the computing step.

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Kawasaki, Japan

Naoji Horiuchi