Disco Corporation

Naohisa Watanabe

Masahiro Wada

A suction holder for sucking and holding a holding target member includes a sucker, a tube bellows connected to a lower end of the sucker, and a tube arranged inside the tube bellows and having an upper end positioned lower than an upper end of the sucker. A lower opening of the tube is communicated with a suction source and the holding target member is contacted with the upper end of the sucker to form a closed room, and the inside of the closed room is placed into a negative pressure state to hold the holding target member.

Suction holder and holding mechanism for ring frame

A ring frame holding mechanism holds under suction a lower surface of a ring frame when the ring frame is set at a target position, by using a positioning unit. In positioning the ring frame, air is discharged through a suction cup in a table to thereby form an air layer between the upper surface of the table and the lower surface of the ring frame. This air layer brings the ring frame and the suction cup into a noncontact state and also depresses the suction cup downward so that the upper end of the suction cup becomes flush with the table. Accordingly, the ring frame can be floated over the suction cup, so that the ring frame can be easily moved horizontally. That is, the ring frame can be easily set to the target position and the occurrence of improper positioning can be suppressed.

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Tokyo, Japan

Naohisa Watanabe