Fujikin Inc.

Other

Kabushiki Kaisha Ultraclean Technology Research Institute

Fujiken, Inc.

Naofumi Yasumoto

Kouji Nishino

Nobukazu Ikeda

Ryousuke Dohi

Kohei Shigyou

Michio Yamaji

Takashi Hirose

Ryosuke Dohi

Eiji Ideta

Tadahiro Ohmi

Tsutomu Shinohara

Kaoru Hirata

Katsuyuki Sugita

Migaku Takahashi

Tsuyoshi Tanikawa

Shinya Ogawa

Tomio Uno

Hiroyuki Fukuda

Koji Nishino

Keisuke Ideguchi

Kunio Nagai

Yasuyuki Yanai

Takahisa Nitta

Kazuhiko Sugiyama

Nobuhiro Miki

Keiko Hada

A flow rate control deviceincludes a control valveprovided in a flow path, a flow rate measurement unitfor measuring fluid flow rate controlled by the control valve, and a controller. The controlleris configured so as to control the opening/closing operation of the control valveto match the measurement integral flow rate based on the signal outputted from the flow rate measurement unit (Vn+Vd) to the target integral flow rate Vs.

Flow rate control device and flow rate control method

Fluid control valve unit

A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.

Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

Passage members each have a required width, a required height, and a required length, and are provided at middle portions in the width direction with fluid passages, respectively. As coupling means, two bolts are used. The middle portion in the width direction of each of the passage members has opposite end portions that are each provided with a female screw and a bolt insertion hole to be faced by the female screw, respectively. The upper bolt is inserted into one of the passage members and is screwed into the female screw of the other passage member. The lower bolt is inserted into the other passage member and is screwed into the female screw of the one of the passage members. The passage members are coupled with use of the two upper and lower bolts whereby a seal member is securely fixed.

Fixing structure for seal member in fluid control apparatus, joint, and fluid control apparatus

A flow passage sealing structure for omitting a process of welding or caulking an orifice plate and a filter plate to an orifice base and a filter base as base materials and allowing further miniaturization, includes a main block () including main flow passages (), recessed portions () provided in side surfaces of the main block and having female screws in inner peripheral surfaces, thin plates () abutting against the bottom surfaces of the recessed portions and having through holes, gasket rings () abutting against the thin plates (), pressing pipelines () having large-diameter portions and internal flow passages communicable with the main flow passages () and abutting against the gasket rings, and fastening screws () abutting against the large-diameter portions and pressing the pressing pipelines by being inserted around the outside of the pressing pipelines and screwed into the female screws.

Flow passage sealing structure

A piezoelectric linear actuator includes a laminated piezoelectric actuator, a lower support member that supports the laminated piezoelectric actuator, a pressing member that biases the laminated piezoelectric actuator from the top thereof, a guide member connected to the lower support member to guide the pressing member; and a displacement transmission member which includes a pair of displacement transmission plates, an adjustment screw connected to the pair of displacement transmission plates, an output section connected to the pair of displacement transmission plates, and an elastic body that biases the output section downward.

Joint member for a fluid controller

A pipe joint comprises a first joint member of synthetic resin having an annular recessed portion in an end face thereof, and a second joint member of synthetic resin having an annular ridge on an end face thereof. The ridge is fitted in the opening of the recessed portion, with a synthetic resin gasket fitted in the recessed portion. When the pipe joint is properly tightened up, the outer surface of the ridge of the second joint member is pressed against the inner surface of the recessed portion of the first joint member with the gasket interposed therebetween in intimate contact with the surfaces approximately over the entire areas thereof.

Pipe joint

A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm , has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member &ldquo;a&rdquo; fixed around the rod-shaped shaft. The member &ldquo;a&rdquo; is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member &ldquo;a&rdquo; up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

Fluid control valve and fluid supply/exhaust system

A fluid control valve, which can control a fluid having a pressure in the order of 10 kg/cm,, has a response time in the order of several milliseconds can be made small in size, and a fluid supply/exhaust system that provides less gas counter flow in the event of a plurality of valves being used. A fluid control valve of the invention controls a fluid moving in a valve body by closing and opening a portion between a valve seat and a valve holder by use of a drive unit. The drive unit has a rod-shaped shaft for application of pressure through the valve seat and the valve holder, and a member &ldquo;a&rdquo; fixed around the rod-shaped shaft. The member &ldquo;a&rdquo; is made from a magnetic material, and has a space between it and the shaft. A coil provided in parallel to the shaft, moves the shaft via the member &ldquo;a&rdquo; up and down by electromagnetic induction, and makes use of a spring force to close and open a portion between the valve seat and the valve holder.

An apparatus for injecting constant quantitative chemicals which is capable of injecting a chemical solution into ultra pure water without generating particulate contamination, and furthermore, the injection interval of the chemical solution to the cleaning nozzle is controlled in units of seconds within a range of a few seconds to 10 or more seconds, and the switching of the type of chemical solution and the changeover to ultra pure water cleaning can be conducted in a short period of time of approximately 1 second. The apparatus includes a chemical solution injection system having a chemical solution retaining part for retaining the chemical solution, a control system for pressurization and depressurization for controlling the pressure of the chemical solution in the chemical solution retaining part at regular intervals, an injection control system which operates in concert with the control of the pressure of the chemical solution, and is structured so as to conduct the intermittent injection and instantaneous mixing function of the chemical solution from the chemical solution injection system to the ultra pure water flow path, and the injection stoppage function, and a chemical solution replenishment system which is structured so as to operate in concert with the control of the chemical solution and to be capable of replenishing the chemical solution in the chemical solution retaining part from a chemical solution source.

Apparatus for injecting constant quantitative chemicals and a method

A tightening device comprises an upper plate, a lower plate disposed below the upper plate in parallel thereto, a nut rotating gear supported by the lower plate so as to be rotatable in a horizontal plane, and a spur gear provided on an underside of the upper plate and meshable with the nut rotating gear for rotating the nut rotating gear. The upper plate has a portion fittable to a flange of an externally threaded member for preventing the rotation of the threaded member, while the nut rotating gear has a portion fittable to a nut. With the nut manually tightened on the threaded member in advance, the flange fitting portion of the upper plate is fitted to the flange, the nut is fitted in the fitting portion of the nut rotating gear, and the spur gear is thereafter rotated, whereby the nut rotating gear is driven to tighten up the nut on the threaded member.

Tightening device

A reference range of tightening torques is predetermined relative to the rotation angle of a threaded member as normally tightened. In tightening up a nut on an externally threaded member, the tightening torque is detected by a torque sensor every time the nut is rotated through a specified angle, and whether the tightening torque relative to the rotation angle is within the reference range is judged by a microcomputer. The result of judgment is indicated by a light-emitting diode and a buzzer.

Growing community of inventors

Osaka, Japan

Naofumi Yasumoto