International Business Machines Corporation

Nancy Wagner Hannon

Roy Rongqing Yu

Thomas Anthony Wassick

Chandrika Prasad

Richard Philip Surprenant

Edward Sumner Begle

Christopher W Cline

Mathias Pierre Jeanneret

A multilayer thin film via landing pad structure includes a thin film conductor structure with a recessed landing pad formed between an upper layer of polyimide dielectric and a lower layer of polyimide dielectric. A multilayer thin film via landing pad structure is formed on a lower layer of dielectric having a top surface. A depression is formed in the top surface of the lower layer of dielectric. The depression has a bottom within the lower layer. A recessed landing pad comprising a conductor is formed in the depression on the surface of the lower layer of dielectric. A conductor line is formed on the lower layer of dielectric in contact with the recessed landing pad. An upper layer of dielectric is formed over the lower layer of dielectric, the thin film conductor line and the recessed landing pad. A conductive via is formed extending through the upper layer of dielectric into contact with the recessed landing pad. Both the recess and the via are formed by laser ablation with the identical mask and laser ablation tool.

Method of forming recessed thin film landing pad structure

A method and structure for providing top-to-bottom repair of a defective I/O net in a thin film transfer and join process. At least one C,location and at least one capture pad are provided on a thin film substrate. The substrate is preferably ceramic. The C,location of the defective net is severed by removal of a delete strap. The corresponding solder connection of the associated capture pad is also removed. A spare C,location and capture pad are connected to provide a Z-repair line imbedded in the TF wiring structure. The Z-repair line is wired to the defective net.

Method and structure for top-to-bottom I/O nets repair in a thin film transfer and join process

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Wappingers Falls, NY, United States of America

Nancy Wagner Hannon