Industrial Technology Research Institute

Nanchou David Liu

Jammy Chin-Ming Huang

Ching-Sung Chiu

Jin-Yuh Lu

A cold cathode emitter structure is described together with two methods for manufacturing it. These methods are cost effective and relatively simple to implement. A key feature is the incorporation of chemical-mechanical polishing into the process. This allows the micro-cones, that serve as cold cathodes, to be easily positioned so that their apexes are located at the correct height relative to the gate lines. A second important feature is that the openings in the gate lines through which the emitted electrons will pass are made to be significantly narrower than in conventional designs.

Method for manufacturing cold cathode arrays

Several methods for manufacturing field emission displays that operate using flat cone emitters are described. These methods are cost effective and relatively simple to implement. A key feature is the incorporation of chemical-mechanical polishing into the process. This allows the micro-cones, that would serve as cold cathodes in conventional structures, to be converted to flat cone emitters at the same time that the gate lines are being formed, the apexes of said flat cones being automatically located at the correct height relative to the gate lines.

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Chutung, Taiwan

Nanchou David Liu