Samsung Electronics Co., Ltd.

Samsung Display Co., Ltd.

NamWook Kang

Heewon Lee

Sangkwon Moon

In Hwan Doh

Seung-Yeon Lee

Hyuneok Shin

Gyungmin Baek

Hyunah Sung

You Jong Lee

Dooseon Yu

A deposition apparatus includes: a susceptor provided with a plurality of susceptor holes defined therein; an electrostatic chuck disposed on the susceptor and provided with a plurality of electrostatic chuck holes defined therein; and a plurality of pins penetrating through the susceptor and the electrostatic chuck to connect the susceptor and the electrostatic chuck. Each of the pins includes a first portion disposed in a corresponding electrostatic chuck hole of the plurality of electrostatic chuck holes and a second portion disposed in a corresponding susceptor hole of the plurality of susceptor holes. The first portion includes a first base portion and a first cooler disposed in the first base portion.

Deposition apparatus and display panel manufacturing apparatus including the same

A method of operating a data storage device includes programming non-fully programmed memory blocks at a point in time when a reference time elapses from a point in time when each of the memory blocks is physically erased, acquiring a first interval and a second interval, calculating a disturb index based on the first interval and the second interval, selecting a victim block for garbage collection based on the disturb index, and copying valid page data of the victim block into a free block. The first interval is defined by a point in time when each of the memory blocks is physically erased and a point in time when each of the memory blocks is fully programmed. The second interval is an interval during which a fully programmed state is maintained after a point in time when each of the memory blocks is fully programmed.

Data storage device including nonvolatile memory device and operating method thereof

Growing community of inventors

Hwaseong-si, South Korea

NamWook Kang