Samsung Electronics Co., Ltd.

Namgyu Baek

Yun-Rae Cho

Sundae Kim

Seokhyun Lee

Hyunggil Baek

Seunghun Shin

Donghoon Won

Provided is a semiconductor device including an interconnection structure provided on a cell region of a substrate to include a first line and a second line sequentially stacked on the substrate, and a defect detection structure provided on a peripheral region of the substrate to include first and second defect detection lines provided at the same levels as those of the first and second lines, respectively.

Semiconductor device

A method of dividing a substrate includes preparing a substrate including a crystalline semiconductor layer having a scribe lane region and device regions, a dielectric layer on the crystalline semiconductor layer, and a partition structure in physical contact with the dielectric layer and provided on the scribe lane region of the crystalline semiconductor layer, forming an amorphous region in the crystalline semiconductor layer, and performing a grinding process on the crystalline semiconductor layer after the forming of the amorphous region. The amorphous region is formed in the scribe lane region of the crystalline semiconductor layer.

Substrate, method of sawing substrate, and semiconductor device

A semiconductor device includes a substrate including a first region and a second region at least partially surrounding the first region in a plan view. A protection pattern is disposed on the second region of the substrate and at least partially surrounds the first region of the substrate in the plan view. A protection trench overlaps the protection pattern and at least partially surrounds the first region of the substrate in the plan view, along the protection pattern. A width of the protection trench is different from a width of the protection pattern.

Semiconductor device having a protection trench, semiconductor wafer including the same, and semiconductor package

Semiconductor device having a peripheral-region defect detection structure

Growing community of inventors

Suwon-si, South Korea

Namgyu Baek