Samsung Electronics Co., Ltd.

Nam-Su Yuk

Se-Ho Park

Tae-Hun Kim

Kyung-Won Kang

Yong-Won Lee

Jae-Won Jeong

Juno Park

Ho-Youl Lee

Ju-No Park

Jae-Young Eom

A substrate transporting apparatus includes a first light emitting sensor emitting a first sensing light in a first direction, a first light receiving sensor receiving the first sensing light, a second light emitting sensor emitting a second sensing light in a second direction different than the first direction, a second light receiving sensor receiving the second sensing light, a substrate transporting loader passing through traveling lines of the first sensing light and the second sensing light, a state information storage unit storing state information of the substrate transporting loader, and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.

Substrate transporting apparatus and method of operating the same

A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.

Cassette transfer apparatus and cassette transferring method using the same

Growing community of inventors

Suwon-si, South Korea

Nam-Su Yuk