Semes Co., Ltd.

Nam Ki Hong

Kisang Eum

Sung Hun Eom

Cheolmin Chol

The present disclosure is to provide a piston assembly in which a particle does not leak out of a cylinder, and including, in an embodiment, a piston body; a piston rod connected to the piston body; a first groove formed in an outer surface of the piston body; and a particle discharge flow path extending from an internal space of the piston body to the outer surface of the piston body.

Piston assembly, air cylinder and apparatus for processing substrate

Disclosed are a substrate alignment apparatus, a substrate processing apparatus, and a substrate processing method using the substrate alignment apparatus. The substrate alignment apparatus and the substrate processing apparatus include a support plate and a plurality of guide units coupled to the support plate to align a position of the substrate. Each of the guide units includes an alignment pin for aligning the substrate in place and a stationary body having a support surface for supporting an edge region of the substrate aligned, the stationary part being fixedly coupled to the support plate. The alignment pin is rotatable about a central axis of the alignment pin relative to the support surface of the stationary part, thereby rapidly aligning the substrate and thus preventing the substrate transferred between a plurality of process chambers by a transfer robot from being separated or having a negative influence on other apparatuses.

Growing community of inventors

Cheonan-si, South Korea

Nam Ki Hong