Akzo Nobel N.v.

Nam Hung Tran

Dennis Leon Deavenport

Joseph N Christopher

Nada El-Zein

Samuel Stewart Newberg

Taeho Ko

John Lawrence Thornton, Jr

Timothy J Michalec

Samuel S Newberg

A bubbler chamber assembly comprising one chamber or two or more chambers connected in series, all chambers being in substantially vertical orientation. A solid or liquid source of the compound is contained in the chamber or chambers. The ratio between the length of the chamber or combined length of chambers connected in series with respect to the direction of flow of the carrier gas through the chamber or chambers and the average diameter equivalent of the cross section of the chamber or chambers with respect to the direction of flow of the carrier gas through the chamber or chambers is not less than about 6:1.

Bubbler for constant vapor delivery of a solid chemical

A process for depositing a substantially pure, conformal metal layer on one or more substrates through the decomposition of a metal-containing precursor. During this deposition process, the substrate(s) is maintained at a temperature greater than the decomposition temperature of the precursor while the surrounding atmosphere is maintained at a temperature lower than the decomposition temperature of the precursor. The precursor is dispersed within a transport medium, e.g., a vapor phase. The concentration of the metal-containing precursor(s) in the vapor phase, which also contains liquid therein, can be at a level to provide conditions at or near saturation for the metal precursor(s). In ensuring the aforementioned temperature control between the transport media and substrate, and in maintaining saturation conditions for the transport media, the quality of the deposited metal thin film is markedly improved and the production of by-product metal dust is greatly reduced or substantially eliminated.

Metallization of substrate(s) by a liquid/vapor deposition process

Organometallic compounds, as exemplified by trimethylaluminum, can be purified by recrystallization from a solvent by cooling. The organometallic compound is first dissolved in a solvent forming a solution and the purified organometallic compound is then recrystallized, under cooling conditions, from the solvent.

Purification of an organometallic compound

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Nam Hung Tran