Samsung Electronics Co., Ltd.

Nam-hee You

Jung-sung Hwang

Soon-young Lee

Sun-young Lee

Dong-soo Lee

Seung-uhn Kim

Kwang-young Kim

In-seop Kim

Young-jin Han

Gee-do Kim

An analysis system and method for a cleanroom environment is disclosed wherein on-line testing of water-soluble contaminants is performed by condensing water vapor from an air sample taken from the clean room. The condenser is connected to a analyzing unit that is used to measure and analyze the water-soluble contaminants in the condensed water received from the condensing unit.

Analysis system and method for water-soluble contaminants in a cleanroom environment

Methods of analyzing water-soluble contaminants comprise providing reference air streams having gaseous water present therein; condensing the reference air streams such that the gaseous water liquefies; pressurizing the liquefied water; and supplying the liquefied water to analyzers. Systems for analyzing water-soluble contaminants comprise air inlets that absorb reference air containing gaseous water therein; valves that control the flow of the reference air in fluid communication with the air inlets; condensers that condense the gaseous water in the reference air in fluid communication with the valves; pressurization pumps that pressurize the water condensed from the reference air in fluid communication with the condensers; and discharge pumps that discharge an excessive amount of water contained in the reference air.

Methods of analyzing water soluble contaminants generated during microelectronic device manufacturing processes

A novel isolated microorganism, Micrococcus luteus KCTC 0369BP, exhibits a linear survival curve versus the concentration of hydrogen peroxide and is thus useful in a method of determining the degree of sterilization of, for example, ultrapure water that has been sterilized by hydrogen peroxide. The novel isolated microorganism produces a surface polysaccharide and a catalase.

Microorganism resistant to hydrogen peroxide

An air conditioning system for a semiconductor clean room includes a chemical filter between an air conditioner including a humidifier and a ULPA filter of the clean room, for ionizing chemical impurities using moisture supplied from the humidifier and then adsorbing the ionized chemical impurities by using the chemical filter. The chemical filter is installed downstream of the humidifier, which applies phosphoric acid for the prevention of scale-formation. This downstream location allows the chemical filter to prevent the phosphoric acid from being included in the fresh air as a new chemical impurity, which makes regulation of temperature and humidity of the air possible without having to use a special and expensive pure steam system.

Growing community of inventors

Yongin, South Korea

Nam-hee You