Applied Materials, Inc.

Nagendra V Madiwal

Andrew Nguyen

Paul Benjamin Reuter

Michael C Kuchar

Travis Morey

Robert Irwin Decottignies

Mitchell DiSanto

Angela Rose Sico

An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

Gas systems and methods for chamber ports

Gas apparatus, systems, and methods for chamber ports

Growing community of inventors

Bengaluru, India

Nagendra V Madiwal