Sunpower Corporation

Total Marketing Services

Centre National De La Recherche Scientifique

Total Sa

Ecole Polytechnique

Maxeon Solar Pte. Ltd.

Nada Habka

Taiqing Qiu

Gilles Olav Tanguy Sylvain Poulain

Sergej Filonovich

Périne Jaffrennou

Pavel Bulkin

Erik Johnson

Gilles Poulain

Bastien Bruneau

Nacib Benmammar

Described herein are methods of fabricating solar cells. In an example, a method of fabricating a solar cell includes forming an amorphous dielectric layer on the back surface of a substrate opposite a light-receiving surface of the substrate. The method also includes forming a microcrystalline silicon layer on the amorphous dielectric layer by plasma enhanced chemical vapor deposition (PECVD). The method also includes forming an amorphous silicon layer on the microcrystalline silicon layer by PECVD. The method also includes annealing the microcrystalline silicon layer and the amorphous silicon layer to form a homogeneous polycrystalline silicon layer from the microcrystalline silicon layer and the amorphous silicon layer. The method also includes forming an emitter region from the homogeneous polycrystalline silicon layer.

Blister-free polycrystalline silicon for solar cells

An apparatus for patterned processing includes a source of input gas, a source of energy suitable for generating a plasma from the input gas in a plasma region and a grounded sample holder configured for receiving a solid sample. The apparatus includes a mask arranged between the plasma region and the grounded sample holder, the mask having a first face oriented toward the plasma region and a second face oriented toward a surface of the solid sample to be processed, the mask including a mask opening extending from the first face to the second face, and an electrical power supply adapted for applying a direct-current bias voltage to the mask, and the mask opening being dimensioned and shaped so as to generate spatially selective patterned processing on the surface of the solid sample.

Apparatus and method for patterned processing

Growing community of inventors

Bourg la Reine, France

Nada Habka