Credence Systems Corporation

Nabil Khater

David A Baker

A manipulator with an expanded range of motion. The manipulator attaches to a testing head for manipulation of the testing head for testing semiconductor devices. A vertical bearing assembly is coupled to a horizontal bearing assembly so as to give vertical and horizontal motion. An expansion joint attaches to the horizontal bearing assembly such that the length of the manipulator may be expanded and retracted. A swing arm attaches to the expansion joint such that it may rotate horizontally. A tumble assembly couples a rotary bearing assembly to the swing arm. The test head attaches to the rotary bearing assembly such that the rotation of the tumble assembly gives tumble rotation and such that the rotation of the rotary bearing assembly gives twist rotation. By rotating the swing arm, tumble rotation may be obtained by rotating the rotary bearing assembly and twist rotation may be obtained by movement of the tumble assembly. The component systems work together to give smooth motion and easy control of the head such that testing may be accomplished for DUT up, DUT down, DUT side and DUT forward using the same tester.

Manipulator with expanded range of motion

A cable tray assembly for a manipulator within a testing device. A manipulator including cables is used for manipulating a testing head for testing semiconductor devices. The cable trays of the present invention are mounted within the manipulator within a cable housing and are mounted on respective rails allowing them to move longitudinally in and out with respect to the cable housing. The cable trays receive and support the cables that run from a frame of a tester system to the testing head. As the manipulator is moved to position the testing head, this causes the cables to move. In response, the cable trays independently move with the movement of the cables so as to allow for a full range of motion of the manipulator while simultaneously relieving compression and tension within the cables which reduces long term cable damage. The cable trays have a greater height with respect to their width so that the cables can more readily flex about an axis parallel to the cable tray height. The cable trays also contain a contoured flange at the bottom of each cable tray to prevent cable chafing. Further, the ends of the cable trays are tapered in length at different angles to maximize cable support while reducing cable tension during flexing. In one instance, three cable trays are used. As the cables are flexed in a direction toward a one cable tray, it moves inward to relieve cable compression as another cable tray on an opposite side moves outward to relieve cable tension.

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San Jose, CA, United States of America

Nabil Khater