Semes Co., Ltd.

Myungjin Kim

Kihoon Choi

Boramchan Sung

Younghoon Jeong

Jangmi Woo

An apparatus for supplying chemical liquid may include at least two ink jet heads, a reservoir for receiving a chemical liquid provided onto a substrate from each of the at least two ink jet heads, a chemical liquid supplying member for providing the chemical liquid to each of the at least two ink jet heads, and a chemical liquid collecting member for drawing and collecting a chemical liquid remaining in each of the at least two ink jet heads. One path of the chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via one of the at least two ink jet heads may be substantially the same as a length of another path of the chemical liquid from the chemical liquid supplying member to the chemical liquid collecting member via the other of the at least two ink jet heads.

Apparatuses for supplying chemical liquid

An apparatus for processing a substrate may include a stage on which a substrate is placed, an ink jet head assembly for discharging chemical liquid onto the substrate, and a gantry for holding the ink jet head assembly over the substrate on the stage. The ink jet head assembly may include an ink jet head for discharging the chemical liquid onto the substrate, a supporting member for holding the ink jet head, a fixing member being combined with supporting member to fix the supporting member to the fixing member, a protruding member disposed on the fixing member, and a receiving member provided in the supporting member to receive the protruding member.

Growing community of inventors

Cheonan-si, South Korea

Myungjin Kim