Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (1 from 131,500 patents)
1 patent:
1. 7131217 - Apparatus and method for drying semiconductor wafers using IPA vapor drying method