Unitex Co., Ltd

Electronics and Telecommunications Research Institute

Myung Gi Lee

Hye Yong Chu

Jeong Ik Lee

Byoung Gon Yu

Seung Koo Park

Doo-Hee Cho

Jaehyun Moon

Nam Sung Cho

Kyung Soo Suh

Jin Wook Shin

Jun-Han Han

Chul Woong Joo

Seongdeok Ahn

Jin Huh

Joo Hyun Hwang

Yong Eui Lee

Un Jeong Kim

Un Jung Kim

The present invention relates to a source container and to a vapor-deposition reactor. The source container according to one embodiment of the present invention comprises: a container comprising an inner wall for delimiting a first space for holing a source material, and a second space which is adjacent to the first space and is for the mixing of vapor emitted from the source material and a carrier gas taken into the inside thereof; a carrier gas inflow pathway which connects the outside of the container second space; a mixed gas discharge pathway which connects the outside of the container and the second space; and a flow-limiting member which expands inside the second space, and provides a first flow barrier surface between the inflow port and the discharge port.

Source container and vapour-deposition reactor

Provided is a method of fabricating an organic scattering layer. The method may include providing a deposition apparatus with a reaction chamber and a source chamber, loading a substrate in the reaction chamber, supplying carrier gas into the source chamber that may be configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25&#xb0; C. to 50&#xb0; C., and spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer including organic particles, which may be provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.

Methods of forming an organic scattering layer, an organic light emitting diode with the scattering layer, and a method of fabricating the organic light emitting

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Gyeonggi-do, South Korea

Myung Gi Lee