Trumpf Laser- Und Systemtechnik Gmbh

Myriam Kaiser

Daniel Flamm

Jonas Kleiner

Malte Kumkar

Daniel Grossmann

Tim Hesse

A method for laser processing a workpiece is provided. The workpiece includes a material transparent to a laser beam of the laser processing. The method includes splitting an input laser beam by using a beam splitter into a plurality of partial beams. The splitting of the input laser beam is performed by application of phases to a beam cross section of the input laser beam. The method further includes focusing the plurality of partial beams decoupled from the beam splitter by using a focusing optical unit. Multiple focus elements are formed by the focusing of the plurality of partial beams. The method further includes subjecting the material of the workpiece to at least a subset of the multiple focus elements. The application of the phases is performed in such a way that at least two of the multiple focus elements have different intensities.

Method and device for laser processing a workpiece

An apparatus for laser machining a workpiece in a machining plane includes a first laser machining unit for forming a first focal zone which extends in a first main direction of extent, and at least one further laser machining unit for forming at least one further focal zone which extends in a further main direction of extent oriented transversely to the first main direction of extent. The first focal zone and the at least one further focal zone are spaced apart from one another parallel to the machining plane at a work distance. The first laser machining unit and the at least one further laser machining unit are movable in an advancement direction that is oriented parallel to the machining plane. The workpiece comprises a material that is transparent to a laser beam which respectively forms the first focal zone and the at least one further focal zone.

Apparatus and method for laser machining a workpiece

For material processing of a material, which is in particular for a laser beam to a large extent transparent, asymmetric shaped modifications are created transverse to the propagation direction of the laser beam. Thereby, the laser beam is shaped for forming an elongated focus zone in the material, wherein the focus zone is such that it includes at least one intensity maximum, which is transverse flattened in a flattening direction, or a transverse and/or axial sequence of asymmetric intensity maxima, which are flattened in a sequence direction. After positioning the focus zone in the material, a modification is created and the material and the focus zone are moved relative to each other in the or across to the flattening direction or in the or across to the sequence direction for forming a crack along an induced preferred direction.

System for asymmetric optical beam shaping

An optical system for shaping a laser beam includes a beam shaping element configured to receive the laser beam having a transverse input intensity profile and to impose a beam shaping phase distribution onto the laser beam. The optical system further includes a near field optical element, arranged downstream of the beam shaping element at a beam shaping distance and is configured to focus the laser beam into the focus zone. The imposed phase distribution results in a virtual optical image of the elongated focus zone located before the beam shaping element. The beam shaping distance corresponds to a propagation length of the laser beam within which the imposed phase distribution transforms the transverse input intensity profile into a transverse output intensity profile at the near field optical element.

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Ditzingen, Germany

Myriam Kaiser