Samsung Electronics Co., Ltd.

Osong Medical Innovation Foundation, Korea University Research and Business Foundation

Ulvac, Inc.

Myeong-Jin Kim

Young-Chai Ko

Sung-Wook Park

Han-Mei Choi

Seung-Ki Chae

Sung-Ho Park

In-Sung Park

Young-Wook Park

Kyoung-Seok Kim

Il-Kyoung Kim

Seiichi Takahashi

Woo-Seok Kim

Ki-Young Yun

Jae-Wook Kim

No-Hyun Huh

Jae-Hyuck An

Kwang-Myung Lee

Kengo Tsutsumi

Eun-Taek Yim

Beung-Keun Lee

Shinji Yanagisawa

Kyoung-Ho Jang

The present disclosure relates to a pre-5th-generation (5G) or 5G communication system to be provided for supporting higher data rates beyond 4th-generation (4G) communication system such as a long term evolution (LTE). A method for selecting a radio frequency beam by a receiving apparatus in a wireless communication system supporting a beamforming scheme includes determining a number of reference signal intervals in which a reference signal is transmitted based on a number of transmitting apparatuses, estimating full channel information by repetitively performing a partial channel estimating based on the number of reference signal intervals, and selecting a reception RF beam and a transmission RF beam for each of the transmitting apparatuses based on the full channel information.

Method and apparatus for selecting beam in wireless communication system supporting beamforming scheme

A frequency assignment method in a communication system is provided. The method includes transmitting, by a base station, a pilot signal to the plurality of terminals; receiving, by the base station, channel information and a Signal to Interference Ratio (SIR) from the plurality of terminals as feedback information; determining, by the base station, a number of subcarriers to be used for interference alignment and a terminal to which interference alignment is to be applied, using the feedback information; selecting, by the base station, a frequency set to be used for interference alignment among preset frequency sets for interference alignment, and generating a transmit precoding matrix using a maximum of Degrees of Freedom (DoF) that can be obtained for each frequency; and transmitting, by the base station, an index of the selected frequency set to the determined terminal using the generated transmit precoding matrix.

Frequency assignment method and transmission apparatus therefor

A vacuum processing apparatus is provided with: a vacuum processing tank; a first gas introduction section that is constructed such that a first processing gas in a radical state is introduced into the vacuum processing tank and is guided to a semiconductor wafer; and a second gas introduction section that is constructed such that a second processing gas that reacts with the first processing gas is introduced into the vacuum processing tank and is guided to the semiconductor wafer. The second gas introduction section has two shower nozzles provided at positions on either side of an introduction pipe provided for the first gas introduction section. According to this vacuum processing apparatus, high speed processing of a number of processing objects can be achieved. Moreover, the in-plane uniformity of the processing objects after processing can be ensured.

Etching apparatus and etching method

A layer deposition method includes: feeding a reactant with a first flow of an inert gas as a carrier gas into a reaction chamber to chemisorb the reactant on a substrate; feeding the first flow of the inert gas to purge the reaction chamber and a first reactant feed line; and feeding the second flow of the inert gas into the reaction chamber through a feed line different from the first reactant feed line.

Layer deposition methods

Growing community of inventors

Gangwon-do, South Korea

Myeong-Jin Kim