Peking University

Muxi Yu

Ru Huang

Yimao Cai

Yinglong Huang

Qiang Li

Li Wang

Yangyuan Wang

Zhenxing Zhang

Wenliang Bai

Disclosed is a resistive random access memory, comprising a substrate, an insulating layer, a bottom electrode, a resistive material film, and a top electrode in an order from bottom to top, wherein the resistive material film is a four-layer structure composed of a same metal oxide; and the four layers in the four-layer structure from bottom to top have resistance values which are increased one after another by more than 10 times, oxygen concentrations which are increased one after another and thickness which are decreased one after another. The present invention may achieve complete formation-rupture of oxygen vacancy conductive filaments (CF) in each layer by dividing the resistive material film of the same metal oxide into four layers according to the different oxygen concentrations, so as to control accurately the resistance values, so that 2-bit storage with high uniformity is achieved.

Resistive random access memory with high uniformity and low power consumption and method for fabricating the same

The present invention relates to a highly reliable nonvolatile memory and a manufacturing method thereof. The nonvolatile memory comprises top electrodes, bottom electrodes and a resistive material layer disposed therebetween, wherein the top electrodes are positioned on top in the memory; the bottom electrodes are positioned on a substrate; metal oxide for forming the resistive material layer is doped with metal; and a metal oxygen storage layer is further disposed between the top electrodes and the resistive material layer. The manufacturing method adopts a method in which a doping method and a double-layer forming method are combined, so that the highly reliable and highly uniform resistive random access memory can be fabricated and accordingly the performance of the memory can be increased.

Highly reliable nonvolatile memory and manufacturing method thereof

A resistive memory having a leakage inhibiting characteristic and a method for fabricating the same, which can suppress a sneak current in a large scaled crossing array of a RRAM. A memory cell forming the resistive memory comprises a lower electrode, a first semiconductor-type oxide layer, a resistive material layer, a second semiconductor-type oxide layer and an upper electrode which are sequentially stacked. Each of the semiconductor-type oxide layers may be a semiconductor-type metal oxide or a semiconductor-type non-metal oxide. The sneak current may be effectively reduced by means of a Schottky barrier formed between the semiconductor-type oxide layer and the metal electrode, the fabrication process is easy to be implemented, and a high device integration degree can be achieved.

Resistive memory and method for fabricating the same

Growing community of inventors

Beijing, China

Muxi Yu