Fujikin Inc.

Other

Tokyo Electron Limited

Connectec Japan Corporation

Mutsunori Koyomogi

Takahiro Matsuda

Megumu Makino

Michio Yamaji

Kazuhiro Yoshikawa

Izuru Shikata

Nobukazu Ikeda

Kouji Nishino

Tsutomu Shinohara

Ryousuke Dohi

Takashi Hirose

Jun Hirose

Yukio Minami

Tetsuya Kojima

Toshiyuki Inada

Masahiko Nakazawa

Tadahiro Ohmi

Kazunari Watanabe

Akihiro Harada

Yohei Uchida

Eiji Ideta

Tomio Uno

Satoshi Kagatsume

Kenji Tsubota

Ichiro Tokuda

Kunihiko Daido

Masahiko Ochiishi

Shigeaki Tanaka

Kazuyuki Tezuka

Masahiko Sogao

Shuhei Ogawa

Seiichi Iida

Haruhiko Kuriki

Shunya Ikeda

Ryuji Yogo

Ichiro Mine

Masamori Tsukada

Jubee Aizawa

Kazutoshi Horikawa

Toru Nebashi

Hidekazu Machida

Nozomi Shimoishizaka

Yoshiaki Yamato

Hiroki Karube

A tool is equipped with a torque sensor, suited for a tightening task of a fastening component of a device such as a fluid control system that requires a large number of fastening components for assembly and has a narrow space for access to the fastening components, and capable of automatically detecting a tightening torque. The tool includes a torque sensor capable of detecting a tightening torque for tightening a fastening component acting on a bit. The torque sensor initiates measurement of the tightening torque when the tightening torque detected exceeds a set threshold value, completes measurement when the tightening torque detected falls below the set threshold value and a set time elapses, and outputs torque-related data formed on the basis of measurement data from measurement initiation to measurement completion and including a measurement time. The torque-related data includes a peak value of the measurement data.

Tool, task management device, task management method, and task management system

A fluid control apparatus has a reduced number of components and enables simple alteration such as increasing or decreasing the number of lines. Chanel blocks on a lower stage include a plural-line (three-line) passage block disposed over a plurality of lines. The plural-line passage block receives an upper stage over three lines, with each of the lines including an inlet extension of a flow rate controller, and two inlet-side on-off valves arranged in series with the inlet extension. The plural-line passage block has longitudinal passages and transverse passages therein. The longitudinal passages are in communication with passages of the fluid control devices arranged in series per line. The transverse passages are in communication with passages of fluid control devices arranged in adjacent lines.

Fluid control apparatus

A plurality of stacked and fixed gas supplying units U, each gas supplying unit U having at least four gas supply lines S is formed by opposingly combining and fixing two flow controllers, each flow controllerprovided with a plurality of flow control units, to a gas inlet-side blockand a gas outlet-side blockthat are disposed in parallel across an interval in plan view and providing each flow controllerwith an inlet opening and closing valveand an outlet opening and closing valve

Integrated type gas supplying apparatus

To provide a check valve which can be used even under a high temperature condition by overcoming a drawback 'valve element sticking to sealing member' associated with high temperature use while enhancing heat resistance. An opening of a fluid path formed in a first body is brought into a closed state by bringing a valve element biased by a biasing member into contact with a sealing member. The sealing member is formed of a post-cured perfluoro elastomer packing. An annular sealing portion which is brought into line contact with the sealing member is formed on the valve element.

Check valve

A fluid control device includes two opening and closing valvesdisposed symmetrical to each other and having an identical shape, two fluid discharge passageshaving an equal length and provided in parallel with each other in outlets of the opening and closing valves, and a connection memberattachable to a chamber and having two fluid passagesformed in an equal length to and communicating with the two fluid discharge passages, the connection member being provided in outlets of the two fluid discharge passages

Fluid control device

Provided is a diaphragm valve that can improve durability when the diaphragm valve is downsized. In a pressing adaptor, a whole lower surface thereof has a taper shape at a predetermined inclination angle. A bottom surface of a depression of a body has a circular flat portion and a depression that is continued to an outer circumference of the flat portion and is depressed with respect to the flat portion. In a diaphragm, in a state where a fluid inflow channel is opened, an upper surface of an outer circumferential edge portion comes into surface contact with the taper-shaped lower surface a of the pressing adaptor, and a lower surface of the outer circumferential edge portion comes into line contact with the outer circumference of the flat portion of the bottom surface of the depression of the body.

Diaphragm valve

To provide a fluid control apparatus capable of reducing the space, while reducing the cost. A fluid control apparatus has a fluid controlling unit and a fluid introducing unit. The fluid introducing unit is divided into three parts: a first and a second inlet-side shutoff/open parts disposed on the inlet side, each made up of 2&#xd7;N/2, disposed between the first and second inlet-side shutoff/open parts and the fluid controlling unit.

A purge line changing block joint for enabling supply of different types of purge gas between lines without a significant remodeling of a fluid control apparatus and the fluid control apparatus is provided. A purge line changing block joint is connected to an upper side of a three-way valve channel portion in at least one line of the plurality of lines. The purge line changing block joint includes a process gas inlet channel communicating with a process gas inlet channel of the three-way valve channel portion, an outlet channel communicating the process gas inlet channel and an outlet channel of the three-way valve channel portion, a channel terminal not in communication with a purge gas inlet channel of the three-way valve channel portion but terminating the same, and a new purge gas inlet channel communicating with the outlet channel and opening on the top surface.

Purge line changing block joint and fluid control apparatus

There is provided a fluid controller having an enhanced vibration preventing characteristic without affecting pressure controlling operations. A valve elementis moved with respect to a valve seatdue to a change of balance between a fluid pressure acting on a diaphragmand an elastic force of a pressure-setting spring, thereby controlling a pressure of a fluid. A vibration prevention memberis placed in a disk-shaped movable memberwhich moves integrally with the diaphragm. The vibration prevention memberincludes a casing which incorporates therein a weight member interposed between elastic members.

Fluid controller

The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint memberincludes a channel blockincluding a V-shaped channelformed therein for communicating adjacent fluid control devicesandto each other at their lower-end openings, and a pressure sensorprovided on a side surface of the channel block. The channel blockis provided with a branched channelwhich is branched from the V-shaped channeland is communicated to the pressure sensor

Sensor-equipped joint member

A pressure sensor apparatus which can provide an integrated fluid control apparatus in which a pressure sensor is easily replaced independently, as well as achieving a more compact structure, and a pressure sensor built-in fluid control equipment. A pressure sensor apparatus () includes a first passage block () in which a predetermined passage () is formed, a second passage block () in which a predetermined passage () is formed and which opposes to the first passage block () at a predetermined interval, and a pressure sensor () which is provided in an opposing surface of any one of the first and second passage blocks () and detects a fluid pressure in an inner passage (), and is integrated in a pressure regulator ().

Pressure sensor apparatus and pressure sensor built-in fluid control equipment

Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers

A control valve comprises a valve body having a fluid channel and a valve seat; a valve operating part; a valve stem supporting member having its upper end fixed to the valve operating part and its lower end fixed to the valve body; a valve stem penetrating the valve stem supporting member and having its upper end part connected to the valve operating part and its lower end part entering the valve body, the valve stem being movable upward or downward by the valve operating part; and a valve element attached to the lower end of the valve stem. The valve element is moved upward or downward by moving the valve stem upward or downward, the valve element being brought into contact with and seated in the valve seat to close a fluid channel as it is moved downward, the valve element being detached from the valve seat to open the fluid channel as it is moved upward. The valve stem supporting member has an upper tubular body and a lower tubular body, the upper tubular body having its upper end fixed to the valve operating part and its lower end detached from the valve body, the lower tubular body having its lower end fixed to the valve body and its upper end detached from the valve operating part, the two tubular bodies being spaced apart each other, the lower end part of the upper tubular body and the upper end part of the lower tubular body being connected by a connecting member.

Control valve

A control valve comprises a valve body having a fluid channel and a valve seat; a valve operating part; a valve stem supporting member having its upper end fixed to the valve operating part and its lower end fixed to the valve body; a valve stem penetrating the valve stem supporting member and having its upper end part connected to the valve operating part and its lower end part entering the valve body, the valve stem being movable upward or downward by the valve operating part; and a valve element attached to the lower end of the valve stem. The valve element is moved upward or downward by moving the valve stem upward or downward, the valve element being brought into contact with and seated in the valve seat to close a fluid channel as it is moved downward, the valve element being detached from the valve seat to open the fluid channel as it is moved upward. The valve stem comprises an upper bar-shaped member of metal connected to the valve operating member and a lower bar-shaped member made of a fiber reinforced plastic to which the valve element is attached. The upper and lower bar-shaped members are movable upward from a lower end position where the valve element is in a fully open state. The lower bar-shaped member is stop from moving upward at an upper end position where the valve element is in a fully open state. An uppward moving distance of the upper bar-shaped member from a lower end position is made longer than a moving distance of the lower bar-shaped member from the lower end position to the upper end position.

Growing community of inventors

Osaka, Japan

Mutsunori Koyomogi