Ngk Insulators, Inc.

Mutsumi Kitagawa

Toshikatsu Kashiwaya

Nobuo Takahashi

Yukihisa Takeuchi

Hideki Shimizu

Tsutomu Nanataki

Koji Kimura

Hirofumi Yamaguchi

Provided is a method of producing a piezoelectric/electrorestrictive film type device including a vibrating laminate obtained by laminating electrode films and piezoelectric/electrorestrictive films on a substrate containing a cavity. The method of producing the vibrating laminate includes: producing the substrate with a cavity, forming the first photoresist film on first principal surface of substrate, irradiating substrate from the second principal surface side of the substrate, transferring the plane shape of the cavity to the first photoresist film, developing and removing the first photoresist film formed in the region where the shape of cavity was formed, forming a lowermost electrode film by plating, and forming additional films other than the lowermost electrode film constituting the vibrating laminate.

Method of producing piezoelectric/electrostrictive film type device

A substrateis prepared. 'A piezoelectric material layerwhich has not been fired' and which will become a piezoelectric membrane is formed above a first principal surfaceof the substrate. A first maskis formed above the piezoelectric material layer. 'The piezoelectric material layerexisting within a portion where the first maskdoes not exist' is eliminated by injecting a blast media including at least one of abrasive grains or an organic solvent onto the first principal surfaceof the substrate. Thereafter, the first maskis eliminated, and the piezoelectric material layeris fired. The substrate has a hollow portion, however, it does not necessarily have the hollow portion.

Method for manufacturing a piezoelectric membrane type device

A manufacturing method for a piezoelectric/electrostrictive film type element and a film constituting a laminated vibrator made of laminations of an electrode film and a piezoelectric/electrostrictive film in a plane position. The piezoelectric/electrostrictive film type element includes a substrate, a lower electrode film provided on the substrate, and a laminated vibrator made of laminations of a piezoelectric/electrostrictive film and an upper electrode film. The lower electrode film is formed by a photolithography method with the substrate, where a cavity is filled with a light shielding agent, as a mask. Thereafter, the piezoelectric/electrostrictive film is formed by electrophoresis of powder of a piezoelectric/electrostrictive material toward the lower electrode film, and the upper electrode film is formed by the photolithography method with the piezoelectric/electrostrictive film as a mask. The piezoelectric/electrostrictive film may be formed by the photolithography method with the lower electrode film as a mask.

Method for manufacturing piezoelectric/electrostrictive film type element

A piezoelectric/electrostrictive device is provided including a substrate section and an operation section disposed on the substrate section. The operation section includes a piezoelectric/electrostrictive film and an electrode film, and the device operates by displacement of the operation section. The piezoelectric/electrostrictive films and electrode films are alternately laminated so that uppermost and lowermost layers form the electrode films. The operation section and the substrate section are integrally fired, and the substrate section is ceramic material containing a titanium element.

Method of manufacturing a piezoelectric/electrostrictive device

A multi-layered piezoelectric device includes a plurality of piezoelectric portions and a plurality of electrodes electrically connected to the piezoelectric portions that are formed in layers on a ceramic substrate. A first piezoelectric portion is made of a piezoelectric ceramic composition containing Ni in an amount of 0.08 to 0.31% by mass (in terms of NiO), and second and upper piezoelectric portions are made of a piezoelectric ceramic composition of higher Ni content than in the first piezoelectric portion. An electrode is provided at least between the first piezoelectric portion and the second piezoelectric portion.

Method of manufacturing a multi-layered piezoelectric

There is disclosed a piezoelectric/electrostrictive body which has superior piezoelectric/electrostrictive properties and which exhibits a sufficient durability even in a case where a flexural displacement is repeated a large number of times. A piezoelectric/electrostrictive bodyis constituted of a large number of crystal grainshaving the piezoelectric/electrostrictive properties in the form of a film or a layer having one or more layers. A number ratio of crystal grains, a part of which is exposed to at least one of interfacesbetween the bodies and the outside in a thickness direction, is 80% or more of a large number of crystal grainsobserved in an arbitrary section in the thickness direction.

Piezoelectric/electrostrictive body, piezoelectric/electrostrictive laminate, and piezoelectric/electrostrictive actuator

There is disclosed a piezoelectric/electrostrictive body which has superior piezoelectric/electrostrictive properties and which exhibits a sufficient durability even in a case where a flexural displacement is repeated a large number of times. A piezoelectric/electrostrictive body is constituted of a large number of crystal grains having the piezoelectric/electrostrictive properties in the form of a film or a layer having one or more layers. A number ratio of crystal grains whose grain diameters W in a width direction are longer than grain diameters T in a thickness direction is 70% or more of a large number of crystal grains observed in an arbitrary section in the thickness direction.

A method for producing a piezoelectric element by superposing a piezoelectric material made of a piezoelectric ceramic composition containing a PbMgNbO&#x2014;PbZrO&#x2014;PbTiOternary system solid solution composition represented by the general formula Pb(MgNb)TiZrOas a main component, and 0.05 to 10.0 mass % of NiO on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere where 0.03&#x2013;0.5 mg/cm(NiO conversion amount per unit volume of a space in a container) of an atmosphere-controlling material having the same composition as the piezoelectric material is coexisted.

Method for producing a piezoelectric element

A piezoelectric/electrostrictive film type actuator is provided including a ceramic substrate and a piezoelectric/electrostrictive device disposed on the ceramic substrate that is provided with a plurality of piezoelectric/electrostrictive films and electrode films. The device is driven by displacement of the piezoelectric/electrostrictive device. The piezoelectric/electrostrictive device includes a plurality of layers of piezoelectric/electrostrictive films, and the piezoelectric/electrostrictive films and electrode films are alternately laminated such that an electrode film forms an uppermost layer and a lowermost layer of the piezoelectric/electrostrictive device.

Piezoelectric/electrostrictive film type actuator and method of manufacturing the actuator

There is disclosed a piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film which includes: a substrate section; and an operation section disposed on the substrate section and constituted of a piezoelectric/electrostrictive film and an electrode film and which operates by displacement of the operation section. The operation section comprises the piezoelectric/electrostrictive films and electrode films alternately laminated so that uppermost and lowermost layers form the electrode films, the operation and substrate sections are integrally fired, and the substrate section is constituted of a ceramic which contains a titanium element. For the piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film, a residual stress after firing hardly exists, therefore larger displacement is obtained with the same driving voltage, response speed is higher, and generation force is larger.

Piezoelectric/electrostrictive device made of piezoelectric/electrostrictive film and manufacturing method

A piezoelectric/electrostrictive film-type actuator has a ceramic base and a piezoelectric/electrostrictive element, which has piezoelectric/electrostrictive films and electrode films and which is disposed on the ceramic base, and is driven in accordance with a dislocation of the piezoelectric/electrostrictive element. The piezoelectric/electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer. This piezoelectric/electrostrictive film-type actuator solves the problem in that a withstand voltage of the piezoelectric/electrostrictive films is likely to decrease, and effectively achieves a bending dislocation.

Method for manufacturing a piezoelectric/electrostrictive film-type actuator

A multi-layered piezoelectric device includes a plurality of piezoelectric portions and a plurality of electrodes electrically connected to the piezoelectric portions, that are formed in layers on a ceramic substrate. A first piezoelectric portion is made of a piezoelectric ceramic composition containing Ni in an amount of 0.08 to 0.31% by mass (in terms of NiO), and second and upper piezoelectric portions are made of a piezoelectric ceramic composition of higher Ni content than in the first piezoelectric portion. An electrode is provided at least between the first piezoelectric portion and the second piezoelectric portion.

Multi-layered type piezoelectric device and process for production thereof

Piezoelectric/electrostrictive film type actuator and method for manufacturing the same

A piezoelectric element includes a ceramic substrate, a piezoelectric portion made of a piezoelectric ceramic composition containing a PbMg Nb O &mdash;PbZrO &mdash;PbTiO ternary system solid solution composition having an average particle diameter of 1-10 &mgr;m with a maximum particle diameter being not more than 5 times as large as the average particle diameter including the chemical formula discussed below as a main component and the piezoelectric and the piezoelectric ceramic composition includes 0.05 to 10.0 mass % of NiO. An electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode. The piezoelectric ceramic composition is represented by the following general formula: Pb (Mg Nb ) Ti Zr O , wherein 0.95&lE;x&lE;1.05; 0.8&lE;y&lE;1.0; a, b and c are decimals falling in a range surrounded by (a,b,c)&equals;(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200) in the coordinates with coordinate axes of the a, b and c, and a&minus;b&plus;c&equals;1.00.

Piezoelectric element and process for production thereof

A piezoelectric element includes: a ceramic substrate, an electrode and a piezoelectric portion made of a piezoelectric ceramic composition containing a Pb(Mg, Ni) Nb O &mdash;PbZrO &mdash;PbTiO ternary system solid solution composition being represented by the following general formula (1) as a main component: Pb &lcub;(Mg Ni ) Nb &rcub; Ti Zr O (1), wherein 0.95&lE;x&lE;1.05; 0.05&lE;y&lE;0.20; 0.90&lE;a&lE;1.10; b,c, and d are decimals falling in a range surrounded by (b, c, d)&equals;(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200) in the coordinates with coordinate axes of said b, c and d, and b&plus;c&plus;d&equals;1.000. The electrode is electrically connected to the piezoelectric portion, and the piezoelectric portion is solidly attached to the ceramic substrate directly or via the electrode.

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Inuyama, Japan

Mutsumi Kitagawa