Seiko Epson Corporation

Satoshi Shinada

Hisashi Miyazawa

Yukiharu Suda

Mutsuhiko Ota

Hisashi Koike

Michinari Tsukahara

Akira Matsuzawa

Tetsushi Takahashi

Yasuyuki Matsumoto

Yasuto Sakai

Motonori Okumura

Yasuo Inaoka

Kazutoshi Goto

Isao Yanagisawa

Takuma Okamuro

Yasunori Onishi

Shunsuke Watanabe

Yuma Fukuzawa

Masato Shimada

Shunya Fukuda

Katsuhiko Maki

Koji Chindo

Yukihiro Hashi

Tatsuro Torimoto

Noriaki Tanaka

Takahiro Kan

Satoshi Sinada

An atomic oscillator includes an atom cell that accommodates an alkali metal atom, a heating device that heats the atom cell, a container that includes a first magnetism shielding member that is disposed between the heating device and the atom cell and a second magnetism shielding member that is disposed on the side opposite the atom cell with respect to the heating device to shield the atom cell from magnetism produced by the heating device, and a thermally insulating member disposed between the first member and the second member.

Atomic oscillator

An atomic oscillator includes a light source unit including a light source and a first temperature control device controlling the light source to have a first temperature, an atom cell unit including an atom cell accommodating an alkali metal atom and that light emitted from the light source enters and a second temperature control device controlling the atom cell to have a second temperature different from the first temperature, and a container accommodating the light source unit and the atom cell unit and has a first surface and a second surface different from the first surface. The light source unit is mounted to the first surface, and an air gap is present between the light source unit and the second surface. The atom cell unit is mounted to the second surface, and an air gap is present between the atom cell unit and the first surface.

A method is provided for manufacturing a piezoelectric device including a piezoelectric element that is disposed above a diaphragm and that has a multilayer structure including a first electrode disposed above the diaphragm, a piezoelectric layer disposed on the first electrode, and a second electrode disposed on the piezoelectric layer. The method includes forming the multilayer structure including the first electrode, the piezoelectric layer, and the second electrode above the diaphragm, forming a voltage application electrode extending outwardly from an end of the second electrode to cover a region located above the piezoelectric layer in an inactive section having no second electrode, applying a voltage between the first electrode and the second electrode, and removing the voltage application electrode.

Method of manufacturing piezoelectric device

A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.

Liquid ejecting head and liquid ejecting apparatus

An ink cartridgeis detachably connected to a head of a record apparatus and has a container main bodyhaving an ink tank chamberopened to the atmosphere in a state in which the head and the cartridge are connected and a first openingthrough which ink can be injected into the ink tank chamber (second ink storage chamber, etc.,). Such an intermediate wallpartitioning the ink tank chamberinto two space partsandplaced side by side in an ink injection direction is disposed in the ink tank chamberand is formed with a through partthrough which ink can be injected.

Ink cartridge and method of ink injection thereinto

An adjusting unit for making positional adjustment of the optical axis adjustment mask, based on the observation by the one optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed, and for making optical axis adjustment of the other optical axis, based on the observation by the other optical unit, such that the reference mark at the one location or the other location and the optical axis adjusting alignment mark corresponding positionally thereto are superposed.

Alignment apparatus and alignment method

The invention provides a liquid ejecting head alignment apparatus that is used for positional determination and adhesion of nozzle plates and a fixation member, each of the nozzle plates having nozzle openings through which each of a plurality of liquid ejecting heads ejects liquid and further having alignment marks for positional alignment, the fixation member holding the nozzle-plate side of the plurality of liquid ejecting heads. The liquid ejecting head alignment apparatus according to the invention includes: a mask made of a transparent material, the mask having reference marks each of which is aligned with the corresponding alignment mark; a spacer jig that is provided between the fixation member and the mask in such a manner that the reference marks and the alignment marks are opposed to each other with a space being left therebetween, one surface of the spacer jig being in contact with the fixation member; and a bifocal microscope having an optical axis and two optical systems that shares the optical axis, the optical axis being oriented from a face of the mask that is opposite to the spacer jig side thereof toward the alignment mark via the reference mark and the space, one of the optical systems being capable of focusing on the reference mark, and the other thereof being capable of focusing on the alignment mark.

Liquid ejecting head alignment apparatus and liquid ejecting head alignment method

An alignment apparatus, which is used when positioning and joining a plurality of workpieces relative to each other, each workpiece having a plurality of alignment marks for alignment, the alignment apparatus includes: a transparent mask provided with reference marks with which the alignment marks are aligned; a mirror disposed between the mask and the workpiece; an optical unit having an optical axis pointed in a direction of the mirror via the reference mark from a side of the mask opposite to the mirror, the optical unit enabling the reference mark and a virtual image of the reference mark reflected in the mirror to be observed simultaneously; and an adjusting unit for making optical axis adjustment of the optical axis, based on the observation by the optical unit, such that a real image of the reference mark and the virtual image of the reference mark reflected in the mirror are superposed.

An ink cartridgeis detachably connected to a head of a record apparatus and has a container main bodyhaving an ink tank chamberopened to the atmosphere in a state in which the head and the cartridge are connected and a first openingthrough which ink can be injected into the ink tank chamber (second ink storage chamberetc.,). Such an intermediate wallpartitioning the ink tank chamberinto two space partsandplaced side by side in an ink injection direction is disposed in the ink tank chamberand is formed with a through partthrough which ink can be injected.

Included are the steps of: forming piezoelectric elements on a surface of a passage-forming substrate with a vibration plate in between, and forming a penetrating portion by removing an area in the vibration plate, which area will serve as a communicating portion; forming lead electrodes and sealing up the penetrating portion with an interconnect layer; joining a reservoir forming plate to a surface of a passage-forming substrate; forming liquid passages by wet-etching; forming protection films on inner surfaces of the liquid passages; detaching and removing a protection film on an interconnect layer; and causing a reservoir portion and a communicating portion to communicate with each other by removing a corresponding part of the interconnect layer, and in accordance with the manufacturing method, while the liquid passages are being formed, the communicating portion is formed in a way that an edge of an opening of the vibration plate is located outside an edge of an opening which is close to the penetrating portion, and in a way that at least the edge of the opening of the penetrating portion is thus configured of only any one of the vibration plate and the interconnect layer.

Method of manufacturing liquid-jet head and liquid-jet head

A method for producing a liquid-jet head comprises the steps of: forming a vibration plate and piezoelectric elements on one surface of a passage-forming substrate, and removing the vibration plate in a region to be a communicating portion, thereby forming an exposed portion; forming a wiring layer on the passage-forming substrate within the exposed portion, and forming lead electrodes; bonding a reservoir forming plate to the one surface of the passage-forming substrate; wet-etching the passage-forming substrate at the other surface thereof to form pressure generating chambers and the communicating portion; forming a liquid-resistant protective film on inner surfaces of the pressure generating chambers and the communicating portion; removing the protective film within the exposed portion; and performing wet etching on the communicating portion side to remove the wiring layer, thereby establishing communication between a reservoir portion and the communicating portion.

Method for producing liquid-jet head

A method of manufacturing a liquid jet head includes the steps of: forming a piezoelectric element on one plane of a passage-forming substrate with a vibration plate interposed therebetween, and removing the vibration plate in an area where a communicating portion is formed, thus forming a penetrated hole; forming a predetermined metal layer on the one plane of the passage-forming substrate on which the piezoelectric element is formed to seal the penetrated hole with the metal layer, and patterning the metal layer in an area corresponding to the piezoelectric element, thus forming a lead electrode; adhering a reservoir-forming plate, in which a reservoir portion is formed, to the one plane of the passage-forming substrate; wet-etching the passage-forming substrate from the other plane thereof until the vibration plate and the metal layer are exposed, thus forming a pressure generating chamber and the communicating portion; and removing the metal layer by etching to allow the reservoir portion and the communicating portion to communicate with each other.

Growing community of inventors

Matsumoto, Japan

Mutsuhiko Ota