Kaneka Corporation

Riken Corporation

Osaka University

Mutsuaki Murakami

Masamitsu Tachibana

Yasushi Nishikawa

Atsushi Tatami

Shigeru Tanaka

Shuhei Wakahara

Kiyokazu Akahori

Hiroyuki Furutani

Hideo Yamagishi

Masaru Nishinaka

Takashi Itoh

Takashi Ito

Kanji Shimoosako

Kanji Shimoohsako

Kazuyuki Tateishi

Koji Okada

Kanji Shimo-Ohsako

Kensuke Murashima

Hiroo Hasebe

Yuki Kawashima

Hirotsugu Ogi

Takahiro Ohishi

Hiroyuki Ogino

Koichi Kusakabe

Akiko Tsujimoto

Yasuhiro Tsukada

Junji Sone

A method for preparing a graphite film includes steps of preparing a carbonized frame carbonized at a temperature Ta, and an aromatic polyimide film or a carbonized film of the aromatic polyimide film carbonized at a temperature Tb, assembling the carbonized frame and the aromatic polyimide film or the carbonized film of the aromatic polyimide film into an intermediary body, carbonizing the intermediary bodyat a temperature Td to produce a carbonized intermediary body, and graphitizing the carbonized intermediary body to produce the graphite film. The temperature Ta is larger than the temperature Tb and the temperature Tb is smaller than the temperature Td. The graphite film has a surface roughness expressed as an arithmetic mean height Sa of less than 18 nm, a thickness of 5 nm or more and less than 10 μm, and an area of 1.0 cmor more and less than 500 cm.

Method for preparing graphite film

A vibrator that is capable of vibrating without using an electrode and has good detection sensitivity is provided. A carbon-based material vibrator for vibration by light irradiation has a biological substance or a substance capable of identifying a biological substance immobilized on the vibrator. The vibrator may not include a counter electrode for applying a voltage to the vibrator. The carbon-based material may be graphite. A thermal conductivity λ1 in a plane direction of the carbon-based material is 100 times or more than a thermal conductivity λ2 in a thickness direction of the carbon-based material.

Carbon-based material vibrator, a sensor element having the same, and a biological substance detection device having the same

A thermal interface material for transferring heat by interposing between two materials may include a graphite film. The graphite film may have a thickness of 1 &#x3bc;m to 50 &#x3bc;m, a density of 1.40 g/cmto 2.26 g/cm, a thermal conductivity of 500 W/mK to 2000 W/mK in a film plane direction, and an arithmetic average roughness Ra of 0.1 &#x3bc;m to 10 &#x3bc;m on a surface of the graphite film.

Thermal interface material, method for thermally coupling with thermal interface material, and method for preparing thermal interface material

A thermal interlace material for transferring heat by interposing between two materials may include a graphite film. The graphite film may have a thickness T of 200 nm to 3 &#x3bc;m, and a ratio Ra/T of an arithmetic average roughness Ra on a surface of the graphite film to the thickness T of the graphite film, may be 0.1 to 30.

The present disclosure relates to a MEMS vibrator or the like that has excellent chemical resistance and an excellent mechanical strength and that is easily thinned. The present disclosure is a MEMS vibrator comprising: a vibrating film including a graphite film; and a silicon member supporting the vibrating film, the graphite film having a thickness of 50 nm or more and less than 20 &#x3bc;m, and the graphite film having a Young's modulus along a graphite film plane direction of 700 GPa or more.

MEMS vibrator and MEMS oscillator

An object of the present invention is to provide a charge stripping film in a charge stripping device of an ion beam, which has high heat resistance and no toxicity, with which there is no risk of activation, with which an ion beam can be made multivalent even if the charge stripping film is thin, and which is resistant to high-energy beam radiation over an extended period of time. The present invention comprises a charge stripping film used in a device which strips a charge of an ion beam, wherein the charge stripping film is a rotary charge stripping film comprising a carbon film having a thermal conductivity of 20 W/mK or more in a film surface direction at 25&#xb0; C., and a film thickness of the carbon film is more than 3 &#x3bc;m and less than 10 &#x3bc;m. The present invention also comprises a charge stripping film used in a device which strips a charge of an ion beam, wherein the charge stripping film is a rotary charge stripping film comprising a carbon film produced by a polymer annealing method, and a film thickness of the carbon film is more than 3 &#x3bc;m and less than 10 &#x3bc;m.

Rotary charge stripping film in charge stripping device of ion beam and charge stripping method of ion beam

The present disclosure relates to a wiring circuit, and a method for producing the wiring circuit, that includes graphite wiring having a specified thickness, a high electrical conductivity, and a high carrier mobility. The wiring circuit may include graphite wiring comprised of graphite where the graphite wiring has a thickness of 3 nm or more and less than 300 nm. The graphite may have an electrical conductivity along a graphite film plane direction of 18000 S/cm or more, and the graphite may have a carrier mobility along the graphite film plane direction of 9500 cm/Vsec or more. The method for producing a wiring circuit may include steps of: (1) bonding a graphite film with a substrate; (2) plasma etching the graphite film to form a graphite thin film; and (3) etching the graphite thin film to form a wiring circuit.

Wiring circuit and method for producing same

Provided is a target plate for radioisotope production that has sufficient durability and sufficient heat resistance for use in radioisotope production and that is capable of reducing the extent of radioactivation. In a target plate for radioisotope production, a support substrate, which supports a target, includes a graphite film(s). The thermal conductivity in a surface direction of the graphite film(s) is 1200 W/(m&#xb7;K) or greater, and the thickness of the graphite film(s) is 0.05 &#x3bc;m or greater and 100 &#x3bc;m or less.

Support substrate for radioisotope production, target plate for radioisotope production, and production method for support substrate

A beam intensity converting film that has sufficient shielding property, sufficient durability, and sufficient heat resistance and that can reduce the extent of radioactivation. An attenuator is constituted by a graphite film placed such that a surface thereof intersects the beam axis of a charged particle beam, the graphite film has a thickness of 1 &#x3bc;m or greater, and the thermal conductivity in a surface direction of the graphite film is equal to or greater than 20 times the thermal conductivity in the thickness direction of the graphite film.

Beam intensity converting film, and method of manufacturing beam intensity converting film

In order to attain an object to achieve a graphite sheet processed product which is made of high quality graphite and which has a smooth cut surface even after being subjected to a cut process, a graphite sheet processed product of the present invention has a thickness of not less than 10 nm and not more than 20 &#x3bc;m, has a cross-sectional area 90% or more of which is occupied by graphite layers each extending continuously or discontinuously in a horizontal direction, the cross-sectional area being observed with use of a scanning electron microscope (SEM), includes therein graphite crystal having an average crystal grain size of not less than 0.35 &#x3bc;m and not more than 25 &#x3bc;m, and has, on a cut surface thereof, a burr having a size that is not more than 15% of a line width thereof, the line width being less than 400 &#x3bc;m.

Graphite-sheet processed article and graphite sheet processed article manufacturing method

A charge stripping method includes irradiating a charge stripping film with an ion beam. The charge stripping film includes a single layer body of a graphitic film having a carbon component of at least 96 at % and a thermal conductivity in a film surface direction at 25&#xb0; C. of at least 800 W/mK, or a laminated body of the graphitic film. The charge stripping film has a thickness of not less than 100 nm and less than 10 &#x3bc;m, a tensile strength in a film surface direction of at least 5 MPa, a coefficient of thermal expansion in the film surface direction of not more than 1&#xd7;10/K, and an area of at least 4 cm.

Charge stripping film for ion beam

A thermal interface material under a high vacuum condition includes a graphite sheet having a thickness of from 9.6 &#x3bc;m to 50 nm and a thermal conductivity in an a-b surface direction at 25&#xb0; C. of not less than 1000 W/mK.

Thermal interface materials made from graphite sheets under high vacuum condition

Provided is an energy degrader including an attenuation member that becomes radioactive only to a lesser extent than conventional attenuation members. An attenuation member () is a graphite film, the graphite film has a thermal conductivity, in a surface direction, of 1200 W/(m&#xb7;K) or greater, and the graphite film has a thickness of 0.1 &#x3bc;m or greater and 50 &#x3bc;m or less.

Energy degrader, charged particle beam emission system provided with same, and method of producing graphite film

A charge stripping film for a charge stripping device of ion beam is a carbon film produced by annealing a polymer film, and has a film thickness of 10 &#x3bc;m to 150 &#x3bc;m, an area of at least 4 cm, and an atomic concentration of carbon of at least 97%. A charge stripping film for a charge stripping device of ion beam is a carbon film having a thermal conductivity in a film surface direction at 25&#xb0; C. of at least 300 W/mK, and has a film thickness of 10 &#x3bc;m to 150 &#x3bc;m, an area of at least 4 cm, and an atomic concentration of carbon of at least 97%.

Charge stripping film for charge stripping device of ion beam

The first present invention is a graphite sheet having a thickness of not more than 9.6 &#x3bc;m and more than 50 nm and a thermal conductivity along the a-b plane direction at 25&#xb0; C. of 1950 W/mK or more. The second present invention is a graphite sheet having a thickness in a range of less than 9.6 &#x3bc;m and 20 nm or more, an area of 9 mm2 or more, and a carrier mobility along the a-b plane direction at 25&#xb0; C. of 8000 cm2/V&#xb7;sec or more.

Growing community of inventors

Osaka, Japan

Mutsuaki Murakami